Fabrication of RF inductor using patterned FeTaN soft magnetic films

Seok Bae, Dong Hoon Shin, Chung Sik Kim, Sung Ryong Ryu, Seung Eui Nam, Jae Sung Song, Masahiro Yamaguchi, Hyoung June Kim

Research output: Contribution to journalConference articlepeer-review


The fabrication of radio frequency (RF) inductor was discussed using patterned FeTaN soft magnetic films. FeTaN nanocrystalline films as a part of magnetic layer showed good soft magnetic properties as well as high magnetization saturation. The RF inductor combine patterned FeTaN film was fabricated.

Original languageEnglish
Pages (from-to)DQ08
JournalDigests of the Intermag Conference
Publication statusPublished - 2002
Event2002 IEEE International Magnetics Conference-2002 IEEE INTERMAG - Amsterdam, Netherlands
Duration: 2002 Apr 282002 May 2


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