Fabrication of SrMO                         3                          (M = Ce and Zr) thin films and SrCeO                         3                         /SrZrO                         3                          superlattices by laser ablation

H. Yugami; H. Naito; H. Arashi

doi:10.1016/S0169-4332(96)00899-9

Fabrication of SrMO ₃ (M = Ce and Zr) thin films and SrCeO ₃ /SrZrO ₃ superlattices by laser ablation

H. Yugami, H. Naito, H. Arashi

ENG - Mechanical Systems Engineering

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

Perovskite-type oxides SrMO ₃ (M:Ce and Zr) thin films and SrCeO ₃ /SrZrO ₃ superlattices have been made by ArF excimer laser ablation method. These materials incorporate a large amount of protons and are well known as proton conducting solid electrolytes. The scanning electron microscope observations reveal that thin films with smooth surface can be grown on (110) surface of MgO substrates. In contrast, only polycrystalline thin films can be grown on (100) surface of MgO substrates, which has been often used for the dielectric film growth. This result would be attributed to the large distortion of crystal structures of these materials from the ideal perovskite. From the result of Raman spectra and the electric conductivity measured on SrZrO ₃ thin films, we found that the concentration of oxygen vacancies decrease with annealing in H ₂ O-vapor atmosphere.

Original language	English
Pages (from-to)	222-226
Number of pages	5
Journal	Applied Surface Science
Volume	113-114
DOIs	https://doi.org/10.1016/S0169-4332(96)00899-9
Publication status	Published - 1997 Apr

Keywords

Laser ablation
Perovskite oxides
Proton
Superlattices
Thin films

ASJC Scopus subject areas

Chemistry(all)
Condensed Matter Physics
Physics and Astronomy(all)
Surfaces and Interfaces
Surfaces, Coatings and Films

Access to Document

10.1016/S0169-4332(96)00899-9

Cite this

Yugami, H., Naito, H., & Arashi, H. (1997). Fabrication of SrMO ₃ (M = Ce and Zr) thin films and SrCeO ₃ /SrZrO ₃ superlattices by laser ablation Applied Surface Science, 113-114, 222-226. https://doi.org/10.1016/S0169-4332(96)00899-9

Fabrication of SrMO ₃ (M = Ce and Zr) thin films and SrCeO ₃ /SrZrO ₃ superlattices by laser ablation . / Yugami, H.; Naito, H.; Arashi, H.
In: Applied Surface Science, Vol. 113-114, 04.1997, p. 222-226.

Research output: Contribution to journal › Article › peer-review

Yugami, H, Naito, H & Arashi, H 1997, ' Fabrication of SrMO ₃ (M = Ce and Zr) thin films and SrCeO ₃ /SrZrO ₃ superlattices by laser ablation ', Applied Surface Science, vol. 113-114, pp. 222-226. https://doi.org/10.1016/S0169-4332(96)00899-9

Yugami H, Naito H, Arashi H. Fabrication of SrMO ₃ (M = Ce and Zr) thin films and SrCeO ₃ /SrZrO ₃ superlattices by laser ablation Applied Surface Science. 1997 Apr;113-114:222-226. doi: 10.1016/S0169-4332(96)00899-9

Yugami, H. ; Naito, H. ; Arashi, H. / Fabrication of SrMO ₃ (M = Ce and Zr) thin films and SrCeO ₃ /SrZrO ₃ superlattices by laser ablation In: Applied Surface Science. 1997 ; Vol. 113-114. pp. 222-226.

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title = " Fabrication of SrMO 3 (M = Ce and Zr) thin films and SrCeO 3 /SrZrO 3 superlattices by laser ablation ",

abstract = " Perovskite-type oxides SrMO 3 (M:Ce and Zr) thin films and SrCeO 3 /SrZrO 3 superlattices have been made by ArF excimer laser ablation method. These materials incorporate a large amount of protons and are well known as proton conducting solid electrolytes. The scanning electron microscope observations reveal that thin films with smooth surface can be grown on (110) surface of MgO substrates. In contrast, only polycrystalline thin films can be grown on (100) surface of MgO substrates, which has been often used for the dielectric film growth. This result would be attributed to the large distortion of crystal structures of these materials from the ideal perovskite. From the result of Raman spectra and the electric conductivity measured on SrZrO 3 thin films, we found that the concentration of oxygen vacancies decrease with annealing in H 2 O-vapor atmosphere. ",

keywords = "Laser ablation, Perovskite oxides, Proton, Superlattices, Thin films",

author = "H. Yugami and H. Naito and H. Arashi",

note = "Funding Information: The authors would like to thank Dr. N. Sata and Professor M. Ishigame of RISM, Tohoku University for the RHEED measurementsa nd Professor S. Yamaguchi and Dr. S. Nagata of IMR, Tohoku University for the RBS measurementsT. hanks are also due to Mr. T. Wakamatsuo f ELIONIX Co. for FE-SEM and EPMA measurementsT. his work is partly supported by a Grant-in-Aid for Scientific Research on Priority Areas (No. 08243207)f rom the Ministry of Education, Science, Sports and Culture.",

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doi = "10.1016/S0169-4332(96)00899-9",

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N2 - Perovskite-type oxides SrMO 3 (M:Ce and Zr) thin films and SrCeO 3 /SrZrO 3 superlattices have been made by ArF excimer laser ablation method. These materials incorporate a large amount of protons and are well known as proton conducting solid electrolytes. The scanning electron microscope observations reveal that thin films with smooth surface can be grown on (110) surface of MgO substrates. In contrast, only polycrystalline thin films can be grown on (100) surface of MgO substrates, which has been often used for the dielectric film growth. This result would be attributed to the large distortion of crystal structures of these materials from the ideal perovskite. From the result of Raman spectra and the electric conductivity measured on SrZrO 3 thin films, we found that the concentration of oxygen vacancies decrease with annealing in H 2 O-vapor atmosphere.

AB - Perovskite-type oxides SrMO 3 (M:Ce and Zr) thin films and SrCeO 3 /SrZrO 3 superlattices have been made by ArF excimer laser ablation method. These materials incorporate a large amount of protons and are well known as proton conducting solid electrolytes. The scanning electron microscope observations reveal that thin films with smooth surface can be grown on (110) surface of MgO substrates. In contrast, only polycrystalline thin films can be grown on (100) surface of MgO substrates, which has been often used for the dielectric film growth. This result would be attributed to the large distortion of crystal structures of these materials from the ideal perovskite. From the result of Raman spectra and the electric conductivity measured on SrZrO 3 thin films, we found that the concentration of oxygen vacancies decrease with annealing in H 2 O-vapor atmosphere.

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KW - Thin films

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