Fabrication of Thin-Film Actuators Using Magnetostriction

T. Honda, M. Yamaguchi, K. I. Arai

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)


We fabricated two kinds of cantilever actuator and a traveling machine by using magnetostrictive Tb-Fe and Sm-Fe thin films on a polyimide substrate. No power supply cable is required for their actuation, because they are driven by an external magnetic field. The magnetostrictive cantilevers exhibited a large deflection in low magnetic fields. Their unique characteristics suggest that magnetostriction can be used as the driving mechanism of microactuators.

Original languageEnglish
Pages (from-to)27-32
Number of pages6
JournalIEEE Translation Journal on Magnetics in Japan
Issue number6
Publication statusPublished - 1994


Dive into the research topics of 'Fabrication of Thin-Film Actuators Using Magnetostriction'. Together they form a unique fingerprint.

Cite this