@inproceedings{3b5808f8ab234dc0af3f47efa61898fd,
title = "Fabrication of varifocal scanner integrated with piezoresistive focal length and angle sensor",
abstract = "We present the varifocal scanner combined with the piezoresistors to monitor the rotation angle and focal length. The angle sensor measures with the accuracy of ±0.021 degree in the range of ±1.2 degree.",
keywords = "piezoresistor, scanner, Varifocal mirror",
author = "Kenta Nakazawa and Takashi Sasaki and Hiromasa Furuta and Jiro Kamiya and Hideki Sasaki and Toshikazu Kamiya and Kazuhiro Hane",
note = "Funding Information: This study was supported in part by JSPS KAKENHI and in part by the Ministry of Education, Culture, Sports, Science, and Technology through the Program for Leading Graduate Schools, Inter-Graduate School Doctoral Degree Program on Global Safety. Publisher Copyright: {\textcopyright} 2017 IEEE.; 22nd International Conference on Optical MEMS and Nanophotonics, OMN 2017 ; Conference date: 13-08-2017 Through 17-08-2017",
year = "2017",
month = sep,
day = "26",
doi = "10.1109/OMN.2017.8051506",
language = "English",
series = "International Conference on Optical MEMS and Nanophotonics",
publisher = "IEEE Computer Society",
booktitle = "2017 International Conference on Optical MEMS and Nanophotonics, OMN 2017 - Proceedings",
address = "United States",
}