TY - GEN
T1 - Fabrication Technology of Quartz Glass Resonator Using Sacrificial Metal Support Structure
AU - Khan, Muhammad Jehanzeb
AU - Tsukamoto, Takashiro
AU - Tanaka, Shuji
N1 - Funding Information:
This work is partly supported by a project commissioned by the New Energy and Industrial Technology Development Organization (NEDO). MJK (MEXT No.160187) would like to acknowledge the Japanese Ministry of Education, Science, Sports and Culture (MEXT).
Publisher Copyright:
© 2020 IEEE.
PY - 2020/3
Y1 - 2020/3
N2 - This paper reports an electromagnetically driven quartz glass micromachined ring resonator on a quartz glass substrate. The resonator was fabricated using Au-Au thermocompression bonding technique. Two types of Au structures were used: temporary supporting structures during fabrication process and permanent structure for anchoring. Time-controlled release process successfully removed the temporary Au support structures while the permanent anchor remained. The released quartz glass resonator, which has 55 μm thickness and 4 mm in diameter, was successfully oscillated by electromagnetic transduction at the resonant frequency of 26.8 KHz.
AB - This paper reports an electromagnetically driven quartz glass micromachined ring resonator on a quartz glass substrate. The resonator was fabricated using Au-Au thermocompression bonding technique. Two types of Au structures were used: temporary supporting structures during fabrication process and permanent structure for anchoring. Time-controlled release process successfully removed the temporary Au support structures while the permanent anchor remained. The released quartz glass resonator, which has 55 μm thickness and 4 mm in diameter, was successfully oscillated by electromagnetic transduction at the resonant frequency of 26.8 KHz.
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U2 - 10.1109/INERTIAL48129.2020.9090012
DO - 10.1109/INERTIAL48129.2020.9090012
M3 - Conference contribution
AN - SCOPUS:85085515039
T3 - INERTIAL 2020 - 7th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
BT - INERTIAL 2020 - 7th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 7th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2020
Y2 - 23 March 2020 through 26 March 2020
ER -