Factors influencing the variation of surface acoustic wave velocity in lithium tetraborate

Vincent Vezin; Shinichiro Inui; Kunio Yamaguchi; Tamotsu Sugawara; Ryuichi Komatsu; Satoshi Uda; Kazuhiko Yamanouchi

doi:10.1143/jjap.36.3074

Factors influencing the variation of surface acoustic wave velocity in lithium tetraborate

Vincent Vezin, Shinichiro Inui, Kunio Yamaguchi, Tamotsu Sugawara, Ryuichi Komatsu, Satoshi Uda, Kazuhiko Yamanouchi

New Industry Creation Hatchery Center (NICHe)

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

Comparison of the resonance frequency of surface acoustic wave (SAW) resonators fabricated on defect-free and highly defective lithium tetraborate wafers was attempted. The intrinsic variation of SAW velocity due to crystal defects, impurities and chemical compositional inhomogeneities for lithium tetraborate wafers is smaller than ±0.011%. In addition, the variation of SAW velocity in a wafer is influenced by the device fabrication process rather than the lithium tetraborate substrate quality.

Original language	English
Pages (from-to)	3074-3075
Number of pages	2
Journal	Japanese Journal of Applied Physics
Volume	36
Issue number	5 SUPPL. B
DOIs	https://doi.org/10.1143/jjap.36.3074
Publication status	Published - 1997 May

Keywords

Crystalline defects
Impurity
Lithium tetraborate
SAW resonator
SAW velocity

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title = "Factors influencing the variation of surface acoustic wave velocity in lithium tetraborate",

abstract = "Comparison of the resonance frequency of surface acoustic wave (SAW) resonators fabricated on defect-free and highly defective lithium tetraborate wafers was attempted. The intrinsic variation of SAW velocity due to crystal defects, impurities and chemical compositional inhomogeneities for lithium tetraborate wafers is smaller than ±0.011%. In addition, the variation of SAW velocity in a wafer is influenced by the device fabrication process rather than the lithium tetraborate substrate quality.",

keywords = "Crystalline defects, Impurity, Lithium tetraborate, SAW resonator, SAW velocity",

author = "Vincent Vezin and Shinichiro Inui and Kunio Yamaguchi and Tamotsu Sugawara and Ryuichi Komatsu and Satoshi Uda and Kazuhiko Yamanouchi",

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AU - Vezin, Vincent

AU - Inui, Shinichiro

AU - Yamaguchi, Kunio

AU - Sugawara, Tamotsu

AU - Komatsu, Ryuichi

AU - Uda, Satoshi

AU - Yamanouchi, Kazuhiko

PY - 1997/5

Y1 - 1997/5

N2 - Comparison of the resonance frequency of surface acoustic wave (SAW) resonators fabricated on defect-free and highly defective lithium tetraborate wafers was attempted. The intrinsic variation of SAW velocity due to crystal defects, impurities and chemical compositional inhomogeneities for lithium tetraborate wafers is smaller than ±0.011%. In addition, the variation of SAW velocity in a wafer is influenced by the device fabrication process rather than the lithium tetraborate substrate quality.

AB - Comparison of the resonance frequency of surface acoustic wave (SAW) resonators fabricated on defect-free and highly defective lithium tetraborate wafers was attempted. The intrinsic variation of SAW velocity due to crystal defects, impurities and chemical compositional inhomogeneities for lithium tetraborate wafers is smaller than ±0.011%. In addition, the variation of SAW velocity in a wafer is influenced by the device fabrication process rather than the lithium tetraborate substrate quality.

KW - Crystalline defects

KW - Impurity

KW - Lithium tetraborate

KW - SAW resonator

KW - SAW velocity

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EP - 3075

JO - Japanese Journal of Applied Physics

JF - Japanese Journal of Applied Physics

IS - 5 SUPPL. B

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Factors influencing the variation of surface acoustic wave velocity in lithium tetraborate

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Keywords

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