Far-infrared-light shadowgraphy for high extraction efficiency of extreme ultraviolet light from a CO2-laser-generated tin plasma

Hiraku Matsukuma; Tatsuya Hosoda; Yosuke Suzuki; Akifumi Yogo; Tatsuya Yanagida; Takeshi Kodama; Hiroaki Nishimura

doi:10.1063/1.4960374

Far-infrared-light shadowgraphy for high extraction efficiency of extreme ultraviolet light from a CO₂-laser-generated tin plasma

Hiraku Matsukuma, Tatsuya Hosoda, Yosuke Suzuki, Akifumi Yogo, Tatsuya Yanagida, Takeshi Kodama, Hiroaki Nishimura

ENG - Finemechanics

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

The two-color, double-pulse method is an efficient scheme to generate extreme ultraviolet light for fabricating the next generation semiconductor microchips. In this method, a Nd:YAG laser pulse is used to expand a several-tens-of-micrometers-scale tin droplet, and a CO₂ laser pulse is subsequently directed at the expanded tin vapor after an appropriate delay time. We propose the use of shadowgraphy with a CO₂ laser probe-pulse scheme to optimize the CO₂ main-drive laser. The distribution of absorption coefficients is derived from the experiment, and the results are converted to a practical absorption rate for the CO₂ main-drive laser.

Original language	English
Article number	051104
Journal	Applied Physics Letters
Volume	109
Issue number	5
DOIs	https://doi.org/10.1063/1.4960374
Publication status	Published - 2016 Aug 1

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abstract = "The two-color, double-pulse method is an efficient scheme to generate extreme ultraviolet light for fabricating the next generation semiconductor microchips. In this method, a Nd:YAG laser pulse is used to expand a several-tens-of-micrometers-scale tin droplet, and a CO2 laser pulse is subsequently directed at the expanded tin vapor after an appropriate delay time. We propose the use of shadowgraphy with a CO2 laser probe-pulse scheme to optimize the CO2 main-drive laser. The distribution of absorption coefficients is derived from the experiment, and the results are converted to a practical absorption rate for the CO2 main-drive laser.",

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AU - Matsukuma, Hiraku

AU - Hosoda, Tatsuya

AU - Suzuki, Yosuke

AU - Yogo, Akifumi

AU - Yanagida, Tatsuya

AU - Kodama, Takeshi

AU - Nishimura, Hiroaki

PY - 2016/8/1

Y1 - 2016/8/1

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AB - The two-color, double-pulse method is an efficient scheme to generate extreme ultraviolet light for fabricating the next generation semiconductor microchips. In this method, a Nd:YAG laser pulse is used to expand a several-tens-of-micrometers-scale tin droplet, and a CO2 laser pulse is subsequently directed at the expanded tin vapor after an appropriate delay time. We propose the use of shadowgraphy with a CO2 laser probe-pulse scheme to optimize the CO2 main-drive laser. The distribution of absorption coefficients is derived from the experiment, and the results are converted to a practical absorption rate for the CO2 main-drive laser.

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Far-infrared-light shadowgraphy for high extraction efficiency of extreme ultraviolet light from a CO₂-laser-generated tin plasma

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