TY - JOUR
T1 - Fatigue of micromachined stainless steel structural materials for vibrational energy harvesting
AU - Shimizu, Y.
AU - Van Minh, L.
AU - Kitayoshi, H.
AU - Kuwano, H.
N1 - Publisher Copyright:
© Published under licence by IOP Publishing Ltd.
PY - 2016/12/14
Y1 - 2016/12/14
N2 - This work presents fatigue measurement for micromachined stainless steel (SUS304) structural substrate using resonant bending mode. Micromachined specimens for fatigue test had a cantilever structure with a proof mass. They were fabricated by FeCl3 wet etching and wire-discharged cutting. The SUS specimens had Young's modulus of 198 GPa on average. The endurance limit of micromachined specimens was 213 MPa on average after 108 cycles under our fracture definition. The large SUS specimens had the endurance limit of 229 MPa after 107 cycles.
AB - This work presents fatigue measurement for micromachined stainless steel (SUS304) structural substrate using resonant bending mode. Micromachined specimens for fatigue test had a cantilever structure with a proof mass. They were fabricated by FeCl3 wet etching and wire-discharged cutting. The SUS specimens had Young's modulus of 198 GPa on average. The endurance limit of micromachined specimens was 213 MPa on average after 108 cycles under our fracture definition. The large SUS specimens had the endurance limit of 229 MPa after 107 cycles.
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U2 - 10.1088/1742-6596/773/1/012116
DO - 10.1088/1742-6596/773/1/012116
M3 - Conference article
AN - SCOPUS:85009748665
SN - 1742-6588
VL - 773
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
IS - 1
M1 - 012116
T2 - 16th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2016
Y2 - 6 December 2016 through 9 December 2016
ER -