TY - GEN
T1 - FBAR Oscillator and MEMS Tunable VCSEL to Generate the Probe Lasers for Microfabricated Atomic Clock
AU - Hara, Motoaki
AU - Shinada, Satoshi
AU - Yano, Yuichiro
AU - Ido, Tetsuya
AU - Zhao, Zhijian
AU - Toda, Masaya
AU - Ono, Takahito
AU - Ito, Horoyuki
N1 - Funding Information:
ACKNOWLEDGMENT Part of this work was supported by SCOPE (No. 195003003) and research and development for expansion of radio wave resources (JPJ000254) from the Ministry of Internal Affairs and Communications (MIC), Japan. The authors would like to thank Mr. Yuki Takahashi, Mr. Toshio Nishizawa, and Dr. Masanori Ueda of TAIYO YUDEN Mobile Technology Co., Ltd., for fruitful discussions on FBAR manufacturing.
Publisher Copyright:
© 2022 IEEE.
PY - 2022
Y1 - 2022
N2 - In this paper, we describe several new approaches to cost reduction for the realization of ultraminiaturized atomic clocks. One is the development of a wavelength tuner for vertical-cavity surface-emitting lasers (VCSELs) for the atomic clocks. Our VCSEL is designed so that an electrostatic actuator can control the length of the laser cavity, eliminating the offset from the desired central wavelength even in postprocessing. This is effective in reducing the screening cost, which is the main factor driving up the cost of laser chips for coherent population trapping (CPT) atomic clocks. In another approach, we used a thin film bulk acoustic resonator (FBAR) for the atomic clock oscillator to significantly reduce the circuit scale and added a balun circuit and a gain adjustment circuit. This oscillator was manufactured using a legacy process with a line width of 180 nm, and good oscillation was successfully confirmed in the 3 GHz band.
AB - In this paper, we describe several new approaches to cost reduction for the realization of ultraminiaturized atomic clocks. One is the development of a wavelength tuner for vertical-cavity surface-emitting lasers (VCSELs) for the atomic clocks. Our VCSEL is designed so that an electrostatic actuator can control the length of the laser cavity, eliminating the offset from the desired central wavelength even in postprocessing. This is effective in reducing the screening cost, which is the main factor driving up the cost of laser chips for coherent population trapping (CPT) atomic clocks. In another approach, we used a thin film bulk acoustic resonator (FBAR) for the atomic clock oscillator to significantly reduce the circuit scale and added a balun circuit and a gain adjustment circuit. This oscillator was manufactured using a legacy process with a line width of 180 nm, and good oscillation was successfully confirmed in the 3 GHz band.
KW - Atomic Clock
KW - CPT
KW - MEMS
KW - VCSEL
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U2 - 10.1109/IUS54386.2022.9958796
DO - 10.1109/IUS54386.2022.9958796
M3 - Conference contribution
AN - SCOPUS:85143750248
T3 - IEEE International Ultrasonics Symposium, IUS
BT - IUS 2022 - IEEE International Ultrasonics Symposium
PB - IEEE Computer Society
T2 - 2022 IEEE International Ultrasonics Symposium, IUS 2022
Y2 - 10 October 2022 through 13 October 2022
ER -