FBAR Oscillator and MEMS Tunable VCSEL to Generate the Probe Lasers for Microfabricated Atomic Clock

Motoaki Hara, Satoshi Shinada, Yuichiro Yano, Tetsuya Ido, Zhijian Zhao, Masaya Toda, Takahito Ono, Horoyuki Ito

Research output: Chapter in Book/Report/Conference proceedingConference contribution


In this paper, we describe several new approaches to cost reduction for the realization of ultraminiaturized atomic clocks. One is the development of a wavelength tuner for vertical-cavity surface-emitting lasers (VCSELs) for the atomic clocks. Our VCSEL is designed so that an electrostatic actuator can control the length of the laser cavity, eliminating the offset from the desired central wavelength even in postprocessing. This is effective in reducing the screening cost, which is the main factor driving up the cost of laser chips for coherent population trapping (CPT) atomic clocks. In another approach, we used a thin film bulk acoustic resonator (FBAR) for the atomic clock oscillator to significantly reduce the circuit scale and added a balun circuit and a gain adjustment circuit. This oscillator was manufactured using a legacy process with a line width of 180 nm, and good oscillation was successfully confirmed in the 3 GHz band.

Original languageEnglish
Title of host publicationIUS 2022 - IEEE International Ultrasonics Symposium
PublisherIEEE Computer Society
ISBN (Electronic)9781665466578
Publication statusPublished - 2022
Event2022 IEEE International Ultrasonics Symposium, IUS 2022 - Venice, Italy
Duration: 2022 Oct 102022 Oct 13

Publication series

NameIEEE International Ultrasonics Symposium, IUS
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727


Conference2022 IEEE International Ultrasonics Symposium, IUS 2022


  • Atomic Clock
  • CPT
  • MEMS

ASJC Scopus subject areas

  • Acoustics and Ultrasonics


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