TY - JOUR
T1 - Femtosecond-laser-induced nanofabrication on glass
AU - Shibata, Akihiro
AU - Kaneko, Naoto
AU - Suzuki, Shinya
AU - Kodama, Shuhei
AU - Shimizu, Jun
AU - Shimada, Keita
AU - Mizutani, Masayoshi
AU - Kuriyagawa, Tsunemoto
PY - 2015/9/1
Y1 - 2015/9/1
N2 - Nanostructure processing method with high productivity is desired for many practical uses. Recent studies report that femtosecond laser process is expected as one of high productive process. By irradiating femtosecond laser to the polished target surface, it is possible to form a nanostructure on laser irradiation entire area. But this method cannot be easily applied to glass substrate because this method needs to generate surface plasmon polariton by laser irradiation. Our research group invented a new method for forming a nano-sizcd texturing on a glass by using light absorbable metal nanoparticles and glass precursor. We made nano-sizcd surface structure on the glass sample, and showed the anti-reflection effect.
AB - Nanostructure processing method with high productivity is desired for many practical uses. Recent studies report that femtosecond laser process is expected as one of high productive process. By irradiating femtosecond laser to the polished target surface, it is possible to form a nanostructure on laser irradiation entire area. But this method cannot be easily applied to glass substrate because this method needs to generate surface plasmon polariton by laser irradiation. Our research group invented a new method for forming a nano-sizcd texturing on a glass by using light absorbable metal nanoparticles and glass precursor. We made nano-sizcd surface structure on the glass sample, and showed the anti-reflection effect.
KW - Femtosecond-laser
KW - Functional interface
KW - Glass
KW - Nano-sizcd texturing
KW - Poly-silazane
KW - Surface plasmon
UR - http://www.scopus.com/inward/record.url?scp=84981713311&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84981713311&partnerID=8YFLogxK
U2 - 10.2493/jjspe.81.862
DO - 10.2493/jjspe.81.862
M3 - Article
AN - SCOPUS:84981713311
SN - 0912-0289
VL - 81
SP - 862
EP - 866
JO - Journal of the Japan Society for Precision Engineering
JF - Journal of the Japan Society for Precision Engineering
IS - 9
ER -