Femtosecond-laser-induced nanofabrication on glass

Akihiro Shibata, Naoto Kaneko, Shinya Suzuki, Shuhei Kodama, Jun Shimizu, Keita Shimada, Masayoshi Mizutani, Tsunemoto Kuriyagawa

Research output: Contribution to journalArticlepeer-review


Nanostructure processing method with high productivity is desired for many practical uses. Recent studies report that femtosecond laser process is expected as one of high productive process. By irradiating femtosecond laser to the polished target surface, it is possible to form a nanostructure on laser irradiation entire area. But this method cannot be easily applied to glass substrate because this method needs to generate surface plasmon polariton by laser irradiation. Our research group invented a new method for forming a nano-sizcd texturing on a glass by using light absorbable metal nanoparticles and glass precursor. We made nano-sizcd surface structure on the glass sample, and showed the anti-reflection effect.

Original languageEnglish
Pages (from-to)862-866
Number of pages5
JournalJournal of the Japan Society for Precision Engineering
Issue number9
Publication statusPublished - 2015 Sept 1


  • Femtosecond-laser
  • Functional interface
  • Glass
  • Nano-sizcd texturing
  • Poly-silazane
  • Surface plasmon


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