TY - JOUR
T1 - Ferroelectric property of an epitaxial lead zirconate titanate thin film deposited by a hydrothermal method
AU - Morita, Takeshi
AU - Wagatsuma, Yasuo
AU - Cho, Yasuo
AU - Morioka, Hitoshi
AU - Funakubo, Hiroshi
AU - Nava, Setter
PY - 2003
Y1 - 2003
N2 - Hydrothermal method has various advantages; low deposition temperature, high-purity, deposition on a three-dimensional structure and a large thickness. Although epitaxial PZT thin film deposition has reported, ferroelectric measurement has not been conducted due to the peel-off morphology of the film. The present paper investigates the improvement of an epitaxial PZT thin film deposited via a hydrothermal method. By adjusting the position at which the substrate was suspended in the solution, smooth morphology surface was successfully obtained. As a bottom electrode, 200 nm SrRuO3 thin film was deposited on SrTiO3 single crystals, and the PZT thin was deposited on SrRuO3. The remanent polarization 2Pr for PZT on SrRuO3/SrTiO3 (001) was 19.5 μC/cm2 and that of PZT on SrRuO3/SrTiO3 (111) was 37.2 μC/cm 2, respectively. The self alignment poling direction was confirmed via scanning nonlinear dielectric microscopy and is thought to have been related to the deposition mechanisms.
AB - Hydrothermal method has various advantages; low deposition temperature, high-purity, deposition on a three-dimensional structure and a large thickness. Although epitaxial PZT thin film deposition has reported, ferroelectric measurement has not been conducted due to the peel-off morphology of the film. The present paper investigates the improvement of an epitaxial PZT thin film deposited via a hydrothermal method. By adjusting the position at which the substrate was suspended in the solution, smooth morphology surface was successfully obtained. As a bottom electrode, 200 nm SrRuO3 thin film was deposited on SrTiO3 single crystals, and the PZT thin was deposited on SrRuO3. The remanent polarization 2Pr for PZT on SrRuO3/SrTiO3 (001) was 19.5 μC/cm2 and that of PZT on SrRuO3/SrTiO3 (111) was 37.2 μC/cm 2, respectively. The self alignment poling direction was confirmed via scanning nonlinear dielectric microscopy and is thought to have been related to the deposition mechanisms.
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U2 - 10.1557/proc-784-c11.31
DO - 10.1557/proc-784-c11.31
M3 - Conference article
AN - SCOPUS:2942633568
SN - 0272-9172
VL - 784
SP - 231
EP - 236
JO - Materials Research Society Symposium - Proceedings
JF - Materials Research Society Symposium - Proceedings
T2 - Ferroelectric Thin Films XII
Y2 - 1 December 2003 through 4 December 2003
ER -