Ferromagnetic resonance behaviors of integrated CoPdAIO magnetic film on coplanar waveguide

CoPdAlO magnetic films, whose ferromagnetic resonance (FMR) frequency was 4.2 GHz, were deposited on a coplanar waveguide (CPW) by using a RF magnetron sputtering method and were then patterned with a size of 2000 μm × 50 μm × 2 μm (l × w × t). In the case of the patterned magnetic films on CPW, the calculated and the measured FMR frequencies were shifted to around 7 GHz, and the measured characteristic impedance of the CPW was also changed by around 7 GHz. In addition, the propagation wavelength shortening effect was enhanced by about 17 % up to 7 GHz compared with that of the CPW without magnetic film. These results show that patterned magnetic films can be used as band-pass filters and broad-band EMI noise filters in the RF and the microwave regions.