Ferromagnetic RF integrated inductor with closed magnetic circuit structure

Masahiro Yamaguchi, Seok Bae, Ki Hyeon Kim, Kenji Tan, Takayuki Kusumi, Kiyoshi Yamakawa

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

28 Citations (Scopus)

Abstract

Closed magnetic circuit type ferromagnetic RF integrated inductors have been fabricated based on MEMS-like micro fabrication techniques. The taper etching process greatly helped to endure sufficient magnetic flux flow at the edge of the top and bottom magnetic layers. Air cores and three different sandwich type ferromagnetic inductos are also microfabricated. Measured results exhibited the quality factor Q=12, being highest among the published data of ferromagnetic RF integrated Inductor at 1 GHz.

Original languageEnglish
Title of host publication2005 IEEE MTT-S International Microwave Symposium Digest
Pages351-354
Number of pages4
DOIs
Publication statusPublished - 2005
Event2005 IEEE MTT-S International Microwave Symposium - Long Beach, CA, United States
Duration: 2005 Jun 122005 Jun 17

Publication series

NameIEEE MTT-S International Microwave Symposium Digest
Volume2005
ISSN (Print)0149-645X

Conference

Conference2005 IEEE MTT-S International Microwave Symposium
Country/TerritoryUnited States
CityLong Beach, CA
Period05/6/1205/6/17

Keywords

  • Electromagnetic field simulation
  • Integrated inductor
  • Magnetic film
  • Quality factor

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