Ferromagnetic shape memory microactuators

Manfred Kohl, Berthold Krevet, Makoto Ohtsuka, Daniel Brugger, Yong Liu

Research output: Contribution to journalArticlepeer-review

20 Citations (Scopus)


The technologies for fabrication, micromachining and integration of Ni-Mn-Ga thin films are developed in order to create novel microactuators and sensors. These devices simultaneously make use of the electrical, thermoelastic and ferromagnetic properties of the thin films allowing a new level of multifunctionality and, as a consequence, particularly compact designs. By adjusting the Ni-content of the thin films, the martensitic and ferromagnetic transformation temperatures are tuned close to each other above 373 K, which has important consequences on the device performance such as actuation stroke and response time. This article focuses on the mechanisms, fabrication technologies as well as typical performance characteristics of Ni-Mn-Ga microvalves and microscanners. The present state-of-the-art of FSMA microactuators is highlighted.

Original languageEnglish
Pages (from-to)639-644
Number of pages6
JournalMaterials Transactions
Issue number3
Publication statusPublished - 2006 Mar


  • Fabrication technologies
  • Ferromagnetic shape memory alloys
  • Finite element simulation
  • Microactuators
  • Nickel-manganese-gallium thin films

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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