Film synthesis of SrTiO3 by the spray-ICP technique

Kyoung Jin Kim, Mitsuo Suzuki, Akira Yoshikawa, Tsuguo Fukuda, Keun Ho Auh, Kun Chul Shin

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


SrTiO3 films were synthesized by spray pyrolysis in combination with a high-temperature inductively-coupled plasma (ICP) as the heat source (spray-ICP technique). Sapphire and fused quartz were used as substrates. Ten minutes of film formation yielded films of 0.5-1.0 μm in thickness. The structure of the films consisted of crystallites about 0.1 μm in size. With respect to the homogeneity of the size and shape of the crystallites, sapphire is superior over fused quartz. X-ray diffraction measurements of the films revealed preferred orientation peaks of (2 0 0), (1 1 1), and (1 1 0) depending on the substrates and their locations from the ICP source.

Original languageEnglish
Pages (from-to)216-219
Number of pages4
JournalJournal of Alloys and Compounds
Issue number1-2
Publication statusPublished - 2007 Aug 16


  • Film growth
  • Spray-ICP technique
  • SrTiO


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