Filtering peripheral high temperature electrons in a cylindrical rf-driven plasmas by an axisymmetric radial magnetic field

Hikaru Akahoshi; Kazunori Takahashi; Akira Ando

doi:10.1063/1.5021804

Filtering peripheral high temperature electrons in a cylindrical rf-driven plasmas by an axisymmetric radial magnetic field

Hikaru Akahoshi, Kazunori Takahashi, Akira Ando

ENG - Electrical Engineering

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

High temperature electrons generated near a radial wall of a cylindrical source tube in a radiofrequency (rf) inductively-coupled plasma is filtered by an axisymmetric radial magnetic field formed near the source exit by locating annular permanent magnets, where the axial magnetic field strength in the radially central region is fairly uniform inside the source tube and is close to zero near the source exit. The source is operated at 3 mTorr in argon and the rf antenna is powered by a 13.56 MHz and 400 W rf generator. Measurement of electron energy probability functions shows the presence of the peripheral high temperature electrons inside the source, while the temperature of the peripheral electrons downstream of the source is observed to be reduced.

Original language	English
Article number	035208
Journal	AIP Advances
Volume	8
Issue number	3
DOIs	https://doi.org/10.1063/1.5021804
Publication status	Published - 2018 Mar 1

ASJC Scopus subject areas

Physics and Astronomy(all)

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10.1063/1.5021804

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title = "Filtering peripheral high temperature electrons in a cylindrical rf-driven plasmas by an axisymmetric radial magnetic field",

abstract = "High temperature electrons generated near a radial wall of a cylindrical source tube in a radiofrequency (rf) inductively-coupled plasma is filtered by an axisymmetric radial magnetic field formed near the source exit by locating annular permanent magnets, where the axial magnetic field strength in the radially central region is fairly uniform inside the source tube and is close to zero near the source exit. The source is operated at 3 mTorr in argon and the rf antenna is powered by a 13.56 MHz and 400 W rf generator. Measurement of electron energy probability functions shows the presence of the peripheral high temperature electrons inside the source, while the temperature of the peripheral electrons downstream of the source is observed to be reduced.",

author = "Hikaru Akahoshi and Kazunori Takahashi and Akira Ando",

note = "Funding Information: This work is partially supported by a grant-in-aid for scientific research (16H04084) from the Japan Society for the Promotion of Science, LHD Project Collaboration Research (NIFS16KLER054), JAXA, the Murata Science Foundation, and Regional Industry Value program by Japan Science and Technology Agency. Publisher Copyright: {\textcopyright} 2018 Author(s).",

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doi = "10.1063/1.5021804",

language = "English",

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journal = "AIP Advances",

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AU - Akahoshi, Hikaru

AU - Takahashi, Kazunori

AU - Ando, Akira

N1 - Funding Information: This work is partially supported by a grant-in-aid for scientific research (16H04084) from the Japan Society for the Promotion of Science, LHD Project Collaboration Research (NIFS16KLER054), JAXA, the Murata Science Foundation, and Regional Industry Value program by Japan Science and Technology Agency. Publisher Copyright: © 2018 Author(s).

PY - 2018/3/1

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N2 - High temperature electrons generated near a radial wall of a cylindrical source tube in a radiofrequency (rf) inductively-coupled plasma is filtered by an axisymmetric radial magnetic field formed near the source exit by locating annular permanent magnets, where the axial magnetic field strength in the radially central region is fairly uniform inside the source tube and is close to zero near the source exit. The source is operated at 3 mTorr in argon and the rf antenna is powered by a 13.56 MHz and 400 W rf generator. Measurement of electron energy probability functions shows the presence of the peripheral high temperature electrons inside the source, while the temperature of the peripheral electrons downstream of the source is observed to be reduced.

AB - High temperature electrons generated near a radial wall of a cylindrical source tube in a radiofrequency (rf) inductively-coupled plasma is filtered by an axisymmetric radial magnetic field formed near the source exit by locating annular permanent magnets, where the axial magnetic field strength in the radially central region is fairly uniform inside the source tube and is close to zero near the source exit. The source is operated at 3 mTorr in argon and the rf antenna is powered by a 13.56 MHz and 400 W rf generator. Measurement of electron energy probability functions shows the presence of the peripheral high temperature electrons inside the source, while the temperature of the peripheral electrons downstream of the source is observed to be reduced.

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Filtering peripheral high temperature electrons in a cylindrical rf-driven plasmas by an axisymmetric radial magnetic field

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