TY - GEN
T1 - Flexible and highly sensitive pressure sensor using multi-walled carbon nanotubes
AU - Osada, Ryusaku
AU - Yumoto, Kanji
AU - Suzuki, Ken
AU - Miura, Hideo
N1 - Funding Information:
This research activity has been supported partially by Japanese Grants-in-aid for Scientific Research, and Tohoku University. This research was supported partly by JSPS KAKENHI Grant Number JP16H06357.
Publisher Copyright:
© 2017 IEEE.
PY - 2017/7/1
Y1 - 2017/7/1
N2 - A flexible and highly sensitive pressure sensor using multiwalled carbon nanotube (MWCNT) was developed in order to assure safe and reliable operation of surgical assisting and care nursing robots. The investigation of the optimum growth condition for MWCNT was carried out to control the shape and size of the MWCNT. Electron beam evaporation (EB) method and arc plasma deposition (APD) method were used to deposit thin catalyst layers. Scanning probe microscope (SPM) was used to investigate the surface condition of the catalyst layers. In this investigation, it was made clear that depositing an iron catalyst layer of 5 nm was the best condition to fabricate MWCNT. In addition, a high quality MWCNT has been synthesized to develop a flexible and highly sensitive pressure sensor. In order to investigate the characteristics and sensitivity of the sensor, a loading test was carried out. It was found out, from this study, that the electrical resistance of the MWCNT sensor increased almost linearly with the applied load and the obtained gauge factor was about 70.
AB - A flexible and highly sensitive pressure sensor using multiwalled carbon nanotube (MWCNT) was developed in order to assure safe and reliable operation of surgical assisting and care nursing robots. The investigation of the optimum growth condition for MWCNT was carried out to control the shape and size of the MWCNT. Electron beam evaporation (EB) method and arc plasma deposition (APD) method were used to deposit thin catalyst layers. Scanning probe microscope (SPM) was used to investigate the surface condition of the catalyst layers. In this investigation, it was made clear that depositing an iron catalyst layer of 5 nm was the best condition to fabricate MWCNT. In addition, a high quality MWCNT has been synthesized to develop a flexible and highly sensitive pressure sensor. In order to investigate the characteristics and sensitivity of the sensor, a loading test was carried out. It was found out, from this study, that the electrical resistance of the MWCNT sensor increased almost linearly with the applied load and the obtained gauge factor was about 70.
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U2 - 10.1109/IMPACT.2017.8255896
DO - 10.1109/IMPACT.2017.8255896
M3 - Conference contribution
AN - SCOPUS:85045131107
T3 - Proceedings of Technical Papers - International Microsystems, Packaging, Assembly, and Circuits Technology Conference, IMPACT
SP - 218
EP - 221
BT - IMPACT 2017 - 12th International Microsystems, Packaging, Assembly and Circuits Technology Conference, Proceedings
PB - IEEE Computer Society
T2 - 12th International Microsystems, Packaging, Assembly and Circuits Technology Conference, IMPACT 2017
Y2 - 25 October 2017 through 27 October 2017
ER -