Flexible hollow waveguides for delivery of excimer-laser light

Yuji Matsuura, Mitsunobu Miyagi

Research output: Contribution to journalArticlepeer-review

22 Citations (Scopus)


A hollow waveguide consisting of a glass tube with a thin aluminum film on the inner surface is proposed for delivery of excimer-laser light. The waveguide, fabricated by a chemical-vapor-deposition method, shows low losses for KrF excimer laser light: the straight loss of a 1-mm-bore waveguide was 0.4 dB/m.

Original languageEnglish
Pages (from-to)1226-1228
Number of pages3
JournalOptics Letters
Issue number15
Publication statusPublished - 1998 Aug 1


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