Flow energy control of nitrogen ions generated by electron cyclotron resonance

The flow energy of nitrogen ions produced by an electron cyclotron resonance (ECR) discharge is controlled by electrostatic acceleration in a plasma synthesis method. The source consists of an ion production region using ECR and a plasma synthesis region. Two grids for potential control and electron reflection of the ion production region, and an electron emitter with mesh shape are installed. In the synthesis region, electrons emitted from the emitter and ions accelerated by electrostatic potential difference between these regions are synthesized, which yields the generation of ion flow in the synthesis region. The electron temperature in the plasma synthesis region can be reduced to about 0.5 eV because of a reflection of high-energy electrons in the ion production region and a supply of thermionic electrons. In addition, it is observed that the density ratio of nitrogen atomic to molecular ions in the synthesis region markedly increases compared with that in the ion production region.