Abstract
UV-curable resins and thermoplastic polymers doped with a fluorescent dye were useful for checking uniformity of residual layer thickness, detecting resist pattern defect, and monitoring resin adhesion to a mold surface in nanoimprinting. The facile and nondestructive inspection method by fluorescent microscopy is described.
| Original language | English |
|---|---|
| Pages (from-to) | 139-140 |
| Number of pages | 2 |
| Journal | Kobunshi |
| Volume | 60 |
| Issue number | 3 |
| Publication status | Published - 2011 Mar |
Keywords
- Defect detection
- Fluorescent microscopy
- Fluorescent resist
- Partem inspection
- Residual layer thickness
- Resin adhesion
- Thermal nanoimprint lithography
- UV nanoimprint lithography