FM/rate integrating MEMS gyroscope using independently controlled CW/CCW mode oscillations on a single resonator

Takashiro Tsukamoto; Shuji Tanaka

doi:10.1109/ISISS.2017.7935661

FM/rate integrating MEMS gyroscope using independently controlled CW/CCW mode oscillations on a single resonator

Takashiro Tsukamoto, Shuji Tanaka

ENG - Robotics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

19 Citations (Scopus)

Abstract

This paper reports a frequency modulated (FM)/rate integrating MEMS gyroscope where superposed clockwise (CW) and counter clockwise (CCW) modes are independently controlled on a single resonator. A frequency and quality factor mismatch compensation method by adjusting the phases and amplitudes of driving signal is proposed and experimentally demonstrated. The mismatch compensation method proposed here could drastically reduce the both angular rate and angle error induced by interference between two oscillation modes. The scale factors were measured as high as about 0.73 having a quite small temperature dependency.

Original language	English
Title of host publication	4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1-4
Number of pages	4
ISBN (Electronic)	9781509032334
DOIs	https://doi.org/10.1109/ISISS.2017.7935661
Publication status	Published - 2017 May 30
Event	4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Kauai, United States Duration: 2017 Mar 27 → 2017 Mar 30

Publication series

Name	4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Proceedings

Conference

Conference	4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017
Country/Territory	United States
City	Kauai
Period	17/3/27 → 17/3/30

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10.1109/ISISS.2017.7935661

Cite this

Tsukamoto, T., & Tanaka, S. (2017). FM/rate integrating MEMS gyroscope using independently controlled CW/CCW mode oscillations on a single resonator. In 4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Proceedings (pp. 1-4). Article 7935661 (4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ISISS.2017.7935661

Tsukamoto, Takashiro ; Tanaka, Shuji. / FM/rate integrating MEMS gyroscope using independently controlled CW/CCW mode oscillations on a single resonator. 4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 1-4 (4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Proceedings).

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title = "FM/rate integrating MEMS gyroscope using independently controlled CW/CCW mode oscillations on a single resonator",

abstract = "This paper reports a frequency modulated (FM)/rate integrating MEMS gyroscope where superposed clockwise (CW) and counter clockwise (CCW) modes are independently controlled on a single resonator. A frequency and quality factor mismatch compensation method by adjusting the phases and amplitudes of driving signal is proposed and experimentally demonstrated. The mismatch compensation method proposed here could drastically reduce the both angular rate and angle error induced by interference between two oscillation modes. The scale factors were measured as high as about 0.73 having a quite small temperature dependency.",

author = "Takashiro Tsukamoto and Shuji Tanaka",

note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 ; Conference date: 27-03-2017 Through 30-03-2017",

year = "2017",

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doi = "10.1109/ISISS.2017.7935661",

language = "English",

series = "4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Proceedings",

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Tsukamoto, T & Tanaka, S 2017, FM/rate integrating MEMS gyroscope using independently controlled CW/CCW mode oscillations on a single resonator. in 4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Proceedings., 7935661, 4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Proceedings, Institute of Electrical and Electronics Engineers Inc., pp. 1-4, 4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017, Kauai, United States, 17/3/27. https://doi.org/10.1109/ISISS.2017.7935661

FM/rate integrating MEMS gyroscope using independently controlled CW/CCW mode oscillations on a single resonator. / Tsukamoto, Takashiro ; Tanaka, Shuji.
4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2017. p. 1-4 7935661 (4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - FM/rate integrating MEMS gyroscope using independently controlled CW/CCW mode oscillations on a single resonator

AU - Tsukamoto, Takashiro

AU - Tanaka, Shuji

PY - 2017/5/30

Y1 - 2017/5/30

N2 - This paper reports a frequency modulated (FM)/rate integrating MEMS gyroscope where superposed clockwise (CW) and counter clockwise (CCW) modes are independently controlled on a single resonator. A frequency and quality factor mismatch compensation method by adjusting the phases and amplitudes of driving signal is proposed and experimentally demonstrated. The mismatch compensation method proposed here could drastically reduce the both angular rate and angle error induced by interference between two oscillation modes. The scale factors were measured as high as about 0.73 having a quite small temperature dependency.

AB - This paper reports a frequency modulated (FM)/rate integrating MEMS gyroscope where superposed clockwise (CW) and counter clockwise (CCW) modes are independently controlled on a single resonator. A frequency and quality factor mismatch compensation method by adjusting the phases and amplitudes of driving signal is proposed and experimentally demonstrated. The mismatch compensation method proposed here could drastically reduce the both angular rate and angle error induced by interference between two oscillation modes. The scale factors were measured as high as about 0.73 having a quite small temperature dependency.

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DO - 10.1109/ISISS.2017.7935661

M3 - Conference contribution

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T3 - 4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Proceedings

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EP - 4

BT - 4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Proceedings

PB - Institute of Electrical and Electronics Engineers Inc.

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Y2 - 27 March 2017 through 30 March 2017

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Tsukamoto T , Tanaka S. FM/rate integrating MEMS gyroscope using independently controlled CW/CCW mode oscillations on a single resonator. In 4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Proceedings. Institute of Electrical and Electronics Engineers Inc. 2017. p. 1-4. 7935661. (4th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2017 - Proceedings). doi: 10.1109/ISISS.2017.7935661

FM/rate integrating MEMS gyroscope using independently controlled CW/CCW mode oscillations on a single resonator

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