Focused electron beam in pyroelectric electron probe microanalyzer

Susumu Imashuku; Akira Imanishi; Jun Kawai

doi:10.1063/1.4816015

Focused electron beam in pyroelectric electron probe microanalyzer

Susumu Imashuku, Akira Imanishi, Jun Kawai

IMR - Materials Processing and Characterization Division

Kyoto University

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)

Abstract

We report a method to focus the electron beam generated using a pyroelectric crystal. An electron beam with a spot size of 100 μm was achieved by applying an electrical field to an electroconductive needle tip set on a pyroelectric crystal. When the focused electron beam bombarded a sample, characteristic X-rays of the sample were only detected due to the production of an electric field between the needle tip and the sample.

Original language	English
Article number	073111
Journal	Review of Scientific Instruments
Volume	84
Issue number	7
DOIs	https://doi.org/10.1063/1.4816015
Publication status	Published - 2013 Jul

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@article{6409cc8c87f943fa8366774b94287b56,

title = "Focused electron beam in pyroelectric electron probe microanalyzer",

abstract = "We report a method to focus the electron beam generated using a pyroelectric crystal. An electron beam with a spot size of 100 μm was achieved by applying an electrical field to an electroconductive needle tip set on a pyroelectric crystal. When the focused electron beam bombarded a sample, characteristic X-rays of the sample were only detected due to the production of an electric field between the needle tip and the sample.",

author = "Susumu Imashuku and Akira Imanishi and Jun Kawai",

note = "Funding Information: The present study was supported by Asahi Glass Foundation.",

year = "2013",

month = jul,

doi = "10.1063/1.4816015",

language = "English",

volume = "84",

journal = "Review of Scientific Instruments",

issn = "0034-6748",

publisher = "American Institute of Physics",

number = "7",

}

TY - JOUR

T1 - Focused electron beam in pyroelectric electron probe microanalyzer

AU - Imashuku, Susumu

AU - Imanishi, Akira

AU - Kawai, Jun

N1 - Funding Information: The present study was supported by Asahi Glass Foundation.

PY - 2013/7

Y1 - 2013/7

N2 - We report a method to focus the electron beam generated using a pyroelectric crystal. An electron beam with a spot size of 100 μm was achieved by applying an electrical field to an electroconductive needle tip set on a pyroelectric crystal. When the focused electron beam bombarded a sample, characteristic X-rays of the sample were only detected due to the production of an electric field between the needle tip and the sample.

AB - We report a method to focus the electron beam generated using a pyroelectric crystal. An electron beam with a spot size of 100 μm was achieved by applying an electrical field to an electroconductive needle tip set on a pyroelectric crystal. When the focused electron beam bombarded a sample, characteristic X-rays of the sample were only detected due to the production of an electric field between the needle tip and the sample.

UR - http://www.scopus.com/inward/record.url?scp=84886734102&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84886734102&partnerID=8YFLogxK

U2 - 10.1063/1.4816015

DO - 10.1063/1.4816015

M3 - Article

AN - SCOPUS:84886734102

SN - 0034-6748

VL - 84

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

IS - 7

M1 - 073111

ER -

Focused electron beam in pyroelectric electron probe microanalyzer

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