Focused electron beam in pyroelectric electron probe microanalyzer

Susumu Imashuku, Akira Imanishi, Jun Kawai

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)


We report a method to focus the electron beam generated using a pyroelectric crystal. An electron beam with a spot size of 100 μm was achieved by applying an electrical field to an electroconductive needle tip set on a pyroelectric crystal. When the focused electron beam bombarded a sample, characteristic X-rays of the sample were only detected due to the production of an electric field between the needle tip and the sample.

Original languageEnglish
Article number073111
JournalReview of Scientific Instruments
Issue number7
Publication statusPublished - 2013 Jul


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