Abstract
We have fabricated micromechanical piezoresistive InAs/Al 0.5Ga0.5Sb cantilevers and the piezoresitace was measured at liquid helium temperature under a magnetic field. Depending on the electron mobility of the InAs films, we observed conductance fluctuation and Schbnikov-de Haas oscillation, which was caused by the quantum effects, in the piezoresistance. At appropriately choosing the magnetic field, we obtained enhanced force and displacement sensitivity of 10-12N/√Hz and 10-11 m/√Hz, respectively.
Original language | English |
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Pages (from-to) | 187-192 |
Number of pages | 6 |
Journal | Institute of Physics Conference Series |
Volume | 184 |
Publication status | Published - 2005 Dec 1 |
Externally published | Yes |
Event | 31st International Symposium of Compound Semiconductors 2004 - Seoul, Korea, Republic of Duration: 2004 Sept 12 → 2004 Dec 16 |
ASJC Scopus subject areas
- Physics and Astronomy(all)