Abstract
Diffusion length of adatoms on surface during epitaxy is finite and strongly depends on growth temperature and growth rate. Formation and development process of InAs/GaAs(001) self-assembled dot is studied by minimizing strain plus surface energy of a dot, wetting layer, and substrate system within a finite area limited by the surface diffusion.
Original language | English |
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Pages (from-to) | 216-218 |
Number of pages | 3 |
Journal | Microelectronics Journal |
Volume | 36 |
Issue number | 3-6 |
DOIs | |
Publication status | Published - 2005 Mar 1 |
Keywords
- Diffusion length
- Energetics
- Lattice misfit
- Self-assembled dot
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering