Formation and structure control of single-walled ckbon nanotubs using plasma - Enhanced chemical vapor deposition

T. Kato; T. Hirata; G. H. Jeong; R. Hatakeyama; K. Tohji

Formation and structure control of single-walled ckbon nanotubs using plasma - Enhanced chemical vapor deposition

T. Kato, T. Hirata, G. H. Jeong, R. Hatakeyama, K. Tohji

ENG - Electronic Engineering

Tohoku University

Research output: Contribution to conference › Paper › peer-review

Abstract

We report a successful SWNT formation using plasma-enhanced chemical vapor deposition (PECVD) method. To the best of our knowledge it is the first report concerning the SWNT formation by PECVD. An appropriate mixture ratio of source gasses under the plasma discharge enables SWNT synthesis temperature to be lowered below 550°C. Furthermore, it is also achieved to control vertical alignment of individual SWNT by restraining the plasma treatment time to very short time.

Original language	English
Pages	10-17
Number of pages	8
Publication status	Published - 2004
Event	ECS Annual Spring Meeting -Fullerenes and Nanotubes: Materials for the New Chemical Frontier - International Symposium on Fullerenes, Nanotubes, and Carbon Nanoclusters - San Antonio, TX, United States Duration: 2004 May 9 → 2004 May 13

Conference

Conference	ECS Annual Spring Meeting -Fullerenes and Nanotubes: Materials for the New Chemical Frontier - International Symposium on Fullerenes, Nanotubes, and Carbon Nanoclusters
Country/Territory	United States
City	San Antonio, TX
Period	04/5/9 → 04/5/13

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Kato, T., Hirata, T., Jeong, G. H., Hatakeyama, R., & Tohji, K. (2004). Formation and structure control of single-walled ckbon nanotubs using plasma - Enhanced chemical vapor deposition. 10-17. Paper presented at ECS Annual Spring Meeting -Fullerenes and Nanotubes: Materials for the New Chemical Frontier - International Symposium on Fullerenes, Nanotubes, and Carbon Nanoclusters, San Antonio, TX, United States.

Kato, T. ; Hirata, T. ; Jeong, G. H. et al. / Formation and structure control of single-walled ckbon nanotubs using plasma - Enhanced chemical vapor deposition. Paper presented at ECS Annual Spring Meeting -Fullerenes and Nanotubes: Materials for the New Chemical Frontier - International Symposium on Fullerenes, Nanotubes, and Carbon Nanoclusters, San Antonio, TX, United States.8 p.

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title = "Formation and structure control of single-walled ckbon nanotubs using plasma - Enhanced chemical vapor deposition",

abstract = "We report a successful SWNT formation using plasma-enhanced chemical vapor deposition (PECVD) method. To the best of our knowledge it is the first report concerning the SWNT formation by PECVD. An appropriate mixture ratio of source gasses under the plasma discharge enables SWNT synthesis temperature to be lowered below 550°C. Furthermore, it is also achieved to control vertical alignment of individual SWNT by restraining the plasma treatment time to very short time.",

author = "T. Kato and T. Hirata and Jeong, {G. H.} and R. Hatakeyama and K. Tohji",

year = "2004",

language = "English",

pages = "10--17",

note = "ECS Annual Spring Meeting -Fullerenes and Nanotubes: Materials for the New Chemical Frontier - International Symposium on Fullerenes, Nanotubes, and Carbon Nanoclusters ; Conference date: 09-05-2004 Through 13-05-2004",

}

Kato, T, Hirata, T, Jeong, GH, Hatakeyama, R & Tohji, K 2004, 'Formation and structure control of single-walled ckbon nanotubs using plasma - Enhanced chemical vapor deposition', Paper presented at ECS Annual Spring Meeting -Fullerenes and Nanotubes: Materials for the New Chemical Frontier - International Symposium on Fullerenes, Nanotubes, and Carbon Nanoclusters, San Antonio, TX, United States, 04/5/9 - 04/5/13 pp. 10-17.

Formation and structure control of single-walled ckbon nanotubs using plasma - Enhanced chemical vapor deposition. / Kato, T.; Hirata, T.; Jeong, G. H. et al.
2004. 10-17 Paper presented at ECS Annual Spring Meeting -Fullerenes and Nanotubes: Materials for the New Chemical Frontier - International Symposium on Fullerenes, Nanotubes, and Carbon Nanoclusters, San Antonio, TX, United States.

Research output: Contribution to conference › Paper › peer-review

TY - CONF

T1 - Formation and structure control of single-walled ckbon nanotubs using plasma - Enhanced chemical vapor deposition

AU - Kato, T.

AU - Hirata, T.

AU - Jeong, G. H.

AU - Hatakeyama, R.

AU - Tohji, K.

PY - 2004

Y1 - 2004

N2 - We report a successful SWNT formation using plasma-enhanced chemical vapor deposition (PECVD) method. To the best of our knowledge it is the first report concerning the SWNT formation by PECVD. An appropriate mixture ratio of source gasses under the plasma discharge enables SWNT synthesis temperature to be lowered below 550°C. Furthermore, it is also achieved to control vertical alignment of individual SWNT by restraining the plasma treatment time to very short time.

AB - We report a successful SWNT formation using plasma-enhanced chemical vapor deposition (PECVD) method. To the best of our knowledge it is the first report concerning the SWNT formation by PECVD. An appropriate mixture ratio of source gasses under the plasma discharge enables SWNT synthesis temperature to be lowered below 550°C. Furthermore, it is also achieved to control vertical alignment of individual SWNT by restraining the plasma treatment time to very short time.

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UR - http://www.scopus.com/inward/citedby.url?scp=33644673208&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:33644673208

SP - 10

EP - 17

T2 - ECS Annual Spring Meeting -Fullerenes and Nanotubes: Materials for the New Chemical Frontier - International Symposium on Fullerenes, Nanotubes, and Carbon Nanoclusters

Y2 - 9 May 2004 through 13 May 2004

ER -

Kato T, Hirata T, Jeong GH, Hatakeyama R, Tohji K. Formation and structure control of single-walled ckbon nanotubs using plasma - Enhanced chemical vapor deposition. 2004. Paper presented at ECS Annual Spring Meeting -Fullerenes and Nanotubes: Materials for the New Chemical Frontier - International Symposium on Fullerenes, Nanotubes, and Carbon Nanoclusters, San Antonio, TX, United States.

Formation and structure control of single-walled ckbon nanotubs using plasma - Enhanced chemical vapor deposition

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