Abstract
Freestanding individual single-walled carbon nanotubes (SWNTs) are successfully produced using plasma-enhanced (PE)CVD. The quantitative effects of plasmas on SWNT growth are also discussed on the basis of detailed plasma measure-ments and simple calculations. According to these quantitative results, it is found that the plasma sheath effectively plays the role of driving force in making individual SWNTs stand vertically on a substrate surface. This three-dimensional alignment control of individual SWNTs based on plasma science and technology has huge potential to create a new type of architecture for future nanotube devices.
Original language | English |
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Pages (from-to) | 345-352 |
Number of pages | 8 |
Journal | Chemical Vapor Deposition |
Volume | 12 |
Issue number | 6 |
DOIs | |
Publication status | Published - 2006 Jun 1 |
Keywords
- Diffusion plasma
- Freestanding structures
- PECVD
- Plasma sheath
- SWNTs
ASJC Scopus subject areas
- Chemistry(all)
- Surfaces and Interfaces
- Process Chemistry and Technology