Formation of nanostructured metallic glass thin films upon sputtering

Sergey V. Ketov; Rastko Joksimovic; Guoqiang Xie; Artem Trifonov; Kazue Kurihara; Dmitri V. Louzguine-Luzgin

doi:10.1016/j.heliyon.2016.e00228

Formation of nanostructured metallic glass thin films upon sputtering

Sergey V. Ketov, Rastko Joksimovic, Guoqiang Xie, Artem Trifonov, Kazue Kurihara, Dmitri V. Louzguine-Luzgin

Research output: Contribution to journal › Article › peer-review

24 Citations (Scopus)

Abstract

Morphology evolution of the multicomponent metallic glass film obtained by radio frequency (RF) magnetron sputtering was investigated in the present work. Two modes of metallic glass sputtering were distinguished: smooth film mode and clustered film mode. The sputtering parameters, which have the most influence on the sputtering modes, were determined. As a result, amorphous Ni-Nb thin films with a smooth surface and nanoglassy structure were deposited on silica float glass and Si substrates. The phase composition of the target appeared to have a significant influence on the chemical composition of the deposited amorphous thin film. The differences in charge transport and nanomechanical properties between the smooth and nanoglassy Ni-Nb film were also determined.

Original language	English
Article number	e00228
Journal	Heliyon
Volume	3
Issue number	1
DOIs	https://doi.org/10.1016/j.heliyon.2016.e00228
Publication status	Published - 2017 Jan 1

Keywords

Engineering
Materials science
Nanotechnology

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10.1016/j.heliyon.2016.e00228

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@article{47797e3c418c4b65879b21040df89a3a,

title = "Formation of nanostructured metallic glass thin films upon sputtering",

abstract = "Morphology evolution of the multicomponent metallic glass film obtained by radio frequency (RF) magnetron sputtering was investigated in the present work. Two modes of metallic glass sputtering were distinguished: smooth film mode and clustered film mode. The sputtering parameters, which have the most influence on the sputtering modes, were determined. As a result, amorphous Ni-Nb thin films with a smooth surface and nanoglassy structure were deposited on silica float glass and Si substrates. The phase composition of the target appeared to have a significant influence on the chemical composition of the deposited amorphous thin film. The differences in charge transport and nanomechanical properties between the smooth and nanoglassy Ni-Nb film were also determined.",

keywords = "Engineering, Materials science, Nanotechnology",

author = "Ketov, {Sergey V.} and Rastko Joksimovic and Guoqiang Xie and Artem Trifonov and Kazue Kurihara and Louzguine-Luzgin, {Dmitri V.}",

note = "Publisher Copyright: {\textcopyright} 2017 The Authors",

year = "2017",

month = jan,

day = "1",

doi = "10.1016/j.heliyon.2016.e00228",

language = "English",

volume = "3",

journal = "Heliyon",

issn = "2405-8440",

publisher = "Elsevier BV",

number = "1",

}

TY - JOUR

T1 - Formation of nanostructured metallic glass thin films upon sputtering

AU - Ketov, Sergey V.

AU - Joksimovic, Rastko

AU - Xie, Guoqiang

AU - Trifonov, Artem

AU - Kurihara, Kazue

AU - Louzguine-Luzgin, Dmitri V.

PY - 2017/1/1

Y1 - 2017/1/1

N2 - Morphology evolution of the multicomponent metallic glass film obtained by radio frequency (RF) magnetron sputtering was investigated in the present work. Two modes of metallic glass sputtering were distinguished: smooth film mode and clustered film mode. The sputtering parameters, which have the most influence on the sputtering modes, were determined. As a result, amorphous Ni-Nb thin films with a smooth surface and nanoglassy structure were deposited on silica float glass and Si substrates. The phase composition of the target appeared to have a significant influence on the chemical composition of the deposited amorphous thin film. The differences in charge transport and nanomechanical properties between the smooth and nanoglassy Ni-Nb film were also determined.

AB - Morphology evolution of the multicomponent metallic glass film obtained by radio frequency (RF) magnetron sputtering was investigated in the present work. Two modes of metallic glass sputtering were distinguished: smooth film mode and clustered film mode. The sputtering parameters, which have the most influence on the sputtering modes, were determined. As a result, amorphous Ni-Nb thin films with a smooth surface and nanoglassy structure were deposited on silica float glass and Si substrates. The phase composition of the target appeared to have a significant influence on the chemical composition of the deposited amorphous thin film. The differences in charge transport and nanomechanical properties between the smooth and nanoglassy Ni-Nb film were also determined.

KW - Engineering

KW - Materials science

KW - Nanotechnology

UR - http://www.scopus.com/inward/record.url?scp=85013597112&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85013597112&partnerID=8YFLogxK

U2 - 10.1016/j.heliyon.2016.e00228

DO - 10.1016/j.heliyon.2016.e00228

M3 - Article

AN - SCOPUS:85013597112

SN - 2405-8440

VL - 3

JO - Heliyon

JF - Heliyon

IS - 1

M1 - e00228

ER -

Formation of nanostructured metallic glass thin films upon sputtering

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