Abstract
A simple method for forming zinc oxide (ZnO) films has been discovered. Radio-frequency (rf) sputtered metallic zinc (Zn) film is boiled in ultrapure water at 368 K. The opaque Zn film changes into a transparent film. It is confirmed by transmission electron microscopy and X-ray diffraction that the transparent film is hexagonal ZnO. Optical and morphological properties of the ZnO film are discussed.
Original language | English |
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Pages (from-to) | 5912-5915 |
Number of pages | 4 |
Journal | Thin Solid Films |
Volume | 518 |
Issue number | 21 |
DOIs | |
Publication status | Published - 2010 Aug 31 |
Keywords
- Hydrothermal treatment
- Optical properties
- Sputtering
- Thin films
- X-ray diffraction
- Zinc
- Zinc oxide
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Metals and Alloys
- Materials Chemistry