Formulae of Total Electron Yield for Multilayers: Extension of Pepper's Method

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Formulae of total electron yield (TEY) for multilayer films are derived from Pepper's single-layer model. In these formulae, the attenuation length of each layer and transmission rate of each interface are taken into account. The TEY spectra of LiF/Si/LiF multilayer films around the Si-L2,3 absorption edge for angles of incidence from 0° to 75° were well explained using these formulae. The relative transmission rate at the interface from Si to LiF to that at the surface from LiF to the vacuum was 0.3, which was explained in terms of potential barriers at the interfaces. The spectral feature of the TEY of multilayer films for normal incidence indicates strongly that of the top layer and includes small interference effect in it. The TEY spectra cannot be regarded as absorption spectra when absorption coefficients are large.

Original languageEnglish
Pages (from-to)6459-6466
Number of pages8
JournalJapanese Journal of Applied Physics
Issue number10
Publication statusPublished - 2003 Oct


  • Angular dependence
  • Attenuation length
  • Interface
  • Multilayer
  • Photoelectric yield
  • Photoelectron
  • Potential barrier
  • TEY
  • Total electron yield
  • Transmission rate
  • Transmissivity
  • Yield


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