Fracture toughness of the interface between CVD diamond film and silicon substrate in the relation with methane concentration in the source gas mixture

Physics

• Diamond Films 100%
• Toughness 50%
• Methane 50%
• Gas Mixture 33%
• Substrates 33%
• Silicon 16%
• Crystal Structure 16%
• Fracture Strength 16%
• Particle 16%
• Behavior 16%
• Variations 16%
• Diamonds 16%

Engineering

• Silicon Substrate 50%
• Gas Mixture 33%
• Source Gas 33%
• Substrates 33%
• Adhesive Strength 16%
• Impact Toughness 16%
• Properties 16%

Material Science

• Diamond Films 100%
• Gas Mixture 33%
• Fracture Toughness 16%
• Liquid Films 16%