Freestanding carbon nanotube bridge grown by hot-filament chemical vapor deposition

H. Miyashita; T. Ono; M. Esashi

doi:10.1109/IMNC.2002.1178531

Freestanding carbon nanotube bridge grown by hot-filament chemical vapor deposition

H. Miyashita, T. Ono, M. Esashi

ENG - Mechanical Systems Engineering

Tohoku University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We had reported that the growth of carbon nanotubes (CNT) was enhanced by electric field with hot-filament chemical vapor deposition (HF-CVD), and SPM probe with an individual CNT was successfully fabricated. This paper describes the growth technique of a freestanding CNT between two opposed silicon electrodes with the electric field enhanced method.

Original language	English
Title of host publication	2002 International Microprocesses and Nanotechnology Conference, MNC 2002
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	36-37
Number of pages	2
ISBN (Electronic)	4891140313, 9784891140311
DOIs	https://doi.org/10.1109/IMNC.2002.1178531
Publication status	Published - 2002
Event	International Microprocesses and Nanotechnology Conference, MNC 2002 - Tokyo, Japan Duration: 2002 Nov 6 → 2002 Nov 8

Publication series

Name	2002 International Microprocesses and Nanotechnology Conference, MNC 2002

Conference

Conference	International Microprocesses and Nanotechnology Conference, MNC 2002
Country/Territory	Japan
City	Tokyo
Period	02/11/6 → 02/11/8

Access to Document

10.1109/IMNC.2002.1178531

Cite this

Miyashita, H., Ono, T., & Esashi, M. (2002). Freestanding carbon nanotube bridge grown by hot-filament chemical vapor deposition. In 2002 International Microprocesses and Nanotechnology Conference, MNC 2002 (pp. 36-37). Article 1178531 (2002 International Microprocesses and Nanotechnology Conference, MNC 2002). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IMNC.2002.1178531

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title = "Freestanding carbon nanotube bridge grown by hot-filament chemical vapor deposition",

abstract = "We had reported that the growth of carbon nanotubes (CNT) was enhanced by electric field with hot-filament chemical vapor deposition (HF-CVD), and SPM probe with an individual CNT was successfully fabricated. This paper describes the growth technique of a freestanding CNT between two opposed silicon electrodes with the electric field enhanced method.",

author = "H. Miyashita and T. Ono and M. Esashi",

note = "Publisher Copyright: {\textcopyright} 2002 IEEE.; International Microprocesses and Nanotechnology Conference, MNC 2002 ; Conference date: 06-11-2002 Through 08-11-2002",

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doi = "10.1109/IMNC.2002.1178531",

language = "English",

series = "2002 International Microprocesses and Nanotechnology Conference, MNC 2002",

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pages = "36--37",

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Miyashita, H, Ono, T & Esashi, M 2002, Freestanding carbon nanotube bridge grown by hot-filament chemical vapor deposition. in 2002 International Microprocesses and Nanotechnology Conference, MNC 2002., 1178531, 2002 International Microprocesses and Nanotechnology Conference, MNC 2002, Institute of Electrical and Electronics Engineers Inc., pp. 36-37, International Microprocesses and Nanotechnology Conference, MNC 2002, Tokyo, Japan, 02/11/6. https://doi.org/10.1109/IMNC.2002.1178531

Freestanding carbon nanotube bridge grown by hot-filament chemical vapor deposition. / Miyashita, H.; Ono, T.; Esashi, M.
2002 International Microprocesses and Nanotechnology Conference, MNC 2002. Institute of Electrical and Electronics Engineers Inc., 2002. p. 36-37 1178531 (2002 International Microprocesses and Nanotechnology Conference, MNC 2002).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Freestanding carbon nanotube bridge grown by hot-filament chemical vapor deposition

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AU - Ono, T.

AU - Esashi, M.

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N2 - We had reported that the growth of carbon nanotubes (CNT) was enhanced by electric field with hot-filament chemical vapor deposition (HF-CVD), and SPM probe with an individual CNT was successfully fabricated. This paper describes the growth technique of a freestanding CNT between two opposed silicon electrodes with the electric field enhanced method.

AB - We had reported that the growth of carbon nanotubes (CNT) was enhanced by electric field with hot-filament chemical vapor deposition (HF-CVD), and SPM probe with an individual CNT was successfully fabricated. This paper describes the growth technique of a freestanding CNT between two opposed silicon electrodes with the electric field enhanced method.

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BT - 2002 International Microprocesses and Nanotechnology Conference, MNC 2002

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Miyashita H, Ono T, Esashi M. Freestanding carbon nanotube bridge grown by hot-filament chemical vapor deposition. In 2002 International Microprocesses and Nanotechnology Conference, MNC 2002. Institute of Electrical and Electronics Engineers Inc. 2002. p. 36-37. 1178531. (2002 International Microprocesses and Nanotechnology Conference, MNC 2002). doi: 10.1109/IMNC.2002.1178531

Freestanding carbon nanotube bridge grown by hot-filament chemical vapor deposition

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