Frequency shift on a micromachined resonator excited photothermally in vacuum

K. Hane; T. Iwatuki; S. Inaba; S. Okuma

doi:10.1063/1.1143271

Frequency shift on a micromachined resonator excited photothermally in vacuum

K. Hane, T. Iwatuki, S. Inaba, S. Okuma

New Industry Creation Hatchery Center (NICHe)

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

The photothermal activation of a micromachined resonator in vacuum is reported. The resonance frequency shift was obtained at the pressures in the viscosity flow region. This effect will be useful for the development of a miniature vacuum gauge operated optically.

Original language	English
Pages (from-to)	3781-3782
Number of pages	2
Journal	Review of Scientific Instruments
Volume	63
Issue number	7
DOIs	https://doi.org/10.1063/1.1143271
Publication status	Published - 1992

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title = "Frequency shift on a micromachined resonator excited photothermally in vacuum",

abstract = "The photothermal activation of a micromachined resonator in vacuum is reported. The resonance frequency shift was obtained at the pressures in the viscosity flow region. This effect will be useful for the development of a miniature vacuum gauge operated optically.",

author = "K. Hane and T. Iwatuki and S. Inaba and S. Okuma",

year = "1992",

doi = "10.1063/1.1143271",

language = "English",

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pages = "3781--3782",

journal = "Review of Scientific Instruments",

issn = "0034-6748",

publisher = "American Institute of Physics",

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T1 - Frequency shift on a micromachined resonator excited photothermally in vacuum

AU - Hane, K.

AU - Iwatuki, T.

AU - Inaba, S.

AU - Okuma, S.

PY - 1992

Y1 - 1992

N2 - The photothermal activation of a micromachined resonator in vacuum is reported. The resonance frequency shift was obtained at the pressures in the viscosity flow region. This effect will be useful for the development of a miniature vacuum gauge operated optically.

AB - The photothermal activation of a micromachined resonator in vacuum is reported. The resonance frequency shift was obtained at the pressures in the viscosity flow region. This effect will be useful for the development of a miniature vacuum gauge operated optically.

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U2 - 10.1063/1.1143271

DO - 10.1063/1.1143271

M3 - Article

AN - SCOPUS:1842604701

SN - 0034-6748

VL - 63

SP - 3781

EP - 3782

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

IS - 7

ER -

Frequency shift on a micromachined resonator excited photothermally in vacuum

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