@article{25e8cc543f604e5cbb077652c0229392,
title = "From Nanometer to Picometer-Improvement of Displacement Sensors",
keywords = "displacement sensor laser interferometer optical encoder, nanometer picometar",
author = "Kazuhiro Hane",
year = "1995",
month = jan,
day = "1",
doi = "10.2493/jjspe.61.1666",
language = "English",
volume = "61",
pages = "1666--1670",
journal = "Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering",
issn = "0912-0289",
publisher = "Japan Society for Precision Engineering",
number = "12",
}