From SOI wafer to micro electron field emission device with focus lenses

Phan Ngoc Minh; Takahito Ono; Nobuyuki Sato; Hidenori Mimura; Kuniyoshi Yokoo; Masayoshi Esashi

doi:10.1109/IVMC.2003.1223042

From SOI wafer to micro electron field emission device with focus lenses

Phan Ngoc Minh, Takahito Ono, Nobuyuki Sato, Hidenori Mimura, Kuniyoshi Yokoo, Masayoshi Esashi

Tohoku University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

3 Citations (Scopus)

Original language	English
Title of host publication	Technical Digest of the 16th International Vacuum Microelectronics Conference, IVMC 2003
Editors	Mikio Takai, Junzo Ishikawa, Yasuhito Gotoh
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	179-180
Number of pages	2
ISBN (Electronic)	4818195154, 9784818195158
DOIs	https://doi.org/10.1109/IVMC.2003.1223042
Publication status	Published - 2003
Event	16th International Vacuum Microelectronics Conference, IVMC 2003 - Toyonaka, Osaka, Japan Duration: 2003 Jul 7 → 2003 Jul 11

Publication series

Name	Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC
Volume	2003-January

Conference

Conference	16th International Vacuum Microelectronics Conference, IVMC 2003
Country/Territory	Japan
City	Toyonaka, Osaka
Period	03/7/7 → 03/7/11

Access to Document

10.1109/IVMC.2003.1223042

Cite this

Minh, P. N., Ono, T., Sato, N., Mimura, H., Yokoo, K., & Esashi, M. (2003). From SOI wafer to micro electron field emission device with focus lenses. In M. Takai, J. Ishikawa, & Y. Gotoh (Eds.), Technical Digest of the 16th International Vacuum Microelectronics Conference, IVMC 2003 (pp. 179-180). Article 1223042 (Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC; Vol. 2003-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IVMC.2003.1223042

Minh, Phan Ngoc ; Ono, Takahito ; Sato, Nobuyuki et al. / From SOI wafer to micro electron field emission device with focus lenses. Technical Digest of the 16th International Vacuum Microelectronics Conference, IVMC 2003. editor / Mikio Takai ; Junzo Ishikawa ; Yasuhito Gotoh. Institute of Electrical and Electronics Engineers Inc., 2003. pp. 179-180 (Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC).

@inproceedings{ec8b704d49ae4365ba8a644a7dbcd89d,

title = "From SOI wafer to micro electron field emission device with focus lenses",

author = "Minh, {Phan Ngoc} and Takahito Ono and Nobuyuki Sato and Hidenori Mimura and Kuniyoshi Yokoo and Masayoshi Esashi",

year = "2003",

doi = "10.1109/IVMC.2003.1223042",

language = "English",

series = "Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "179--180",

editor = "Mikio Takai and Junzo Ishikawa and Yasuhito Gotoh",

booktitle = "Technical Digest of the 16th International Vacuum Microelectronics Conference, IVMC 2003",

address = "United States",

note = "16th International Vacuum Microelectronics Conference, IVMC 2003 ; Conference date: 07-07-2003 Through 11-07-2003",

}

Minh, PN, Ono, T , Sato, N, Mimura, H, Yokoo, K & Esashi, M 2003, From SOI wafer to micro electron field emission device with focus lenses. in M Takai, J Ishikawa & Y Gotoh (eds), Technical Digest of the 16th International Vacuum Microelectronics Conference, IVMC 2003., 1223042, Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC, vol. 2003-January, Institute of Electrical and Electronics Engineers Inc., pp. 179-180, 16th International Vacuum Microelectronics Conference, IVMC 2003, Toyonaka, Osaka, Japan, 03/7/7. https://doi.org/10.1109/IVMC.2003.1223042

From SOI wafer to micro electron field emission device with focus lenses. / Minh, Phan Ngoc; Ono, Takahito ; Sato, Nobuyuki et al.
Technical Digest of the 16th International Vacuum Microelectronics Conference, IVMC 2003. ed. / Mikio Takai; Junzo Ishikawa; Yasuhito Gotoh. Institute of Electrical and Electronics Engineers Inc., 2003. p. 179-180 1223042 (Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC; Vol. 2003-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - From SOI wafer to micro electron field emission device with focus lenses

AU - Minh, Phan Ngoc

AU - Ono, Takahito

AU - Sato, Nobuyuki

AU - Mimura, Hidenori

AU - Yokoo, Kuniyoshi

AU - Esashi, Masayoshi

PY - 2003

Y1 - 2003

UR - http://www.scopus.com/inward/record.url?scp=5444270252&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=5444270252&partnerID=8YFLogxK

U2 - 10.1109/IVMC.2003.1223042

DO - 10.1109/IVMC.2003.1223042

M3 - Conference contribution

AN - SCOPUS:5444270252

T3 - Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC

SP - 179

EP - 180

BT - Technical Digest of the 16th International Vacuum Microelectronics Conference, IVMC 2003

A2 - Takai, Mikio

A2 - Ishikawa, Junzo

A2 - Gotoh, Yasuhito

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 16th International Vacuum Microelectronics Conference, IVMC 2003

Y2 - 7 July 2003 through 11 July 2003

ER -

Minh PN, Ono T , Sato N, Mimura H, Yokoo K, Esashi M. From SOI wafer to micro electron field emission device with focus lenses. In Takai M, Ishikawa J, Gotoh Y, editors, Technical Digest of the 16th International Vacuum Microelectronics Conference, IVMC 2003. Institute of Electrical and Electronics Engineers Inc. 2003. p. 179-180. 1223042. (Proceedings of the IEEE International Vacuum Microelectronics Conference, IVMC). doi: 10.1109/IVMC.2003.1223042

From SOI wafer to micro electron field emission device with focus lenses

Publication series

Conference

Access to Document

Other files and links

Cite this