TY - JOUR
T1 - Fully differential single resonator FM gyroscope using CW/CCW mode separator
AU - Tsukamoto, Takashiro
AU - Tanaka, Shuji
N1 - Funding Information:
Manuscript received May 10, 2018; revised September 15, 2018; accepted September 22, 2018. Date of publication October 22, 2018; date of current version November 29, 2018. This work was supported in part by a project commissioned by the New Energy and Industrial Technology Development Organization (NEDO). Subject Editor D. Elata. (Corresponding author: Takashiro Tsukamoto.) The authors are with the Department of Robotics, Tohoku University, Sendai 980-8579, Japan (e-mail: t_tsuka@mems.mech.tohoku.ac.jp).
Publisher Copyright:
© 1992-2012 IEEE.
PY - 2018/12
Y1 - 2018/12
N2 - This paper reports a fully differential frequency modulated (FM) gyroscope where the superposed clockwise (CW) and counter clockwise (CCW) modes are independently controlled on a single resonator. The CW and CCW mode detectors were developed to control both modes simultaneously on the resonator. A frequency and quality factor mismatch compensation method was developed to perfectly orthogonalize these two modes. A FM gyroscope operation with excellent linearity between applied angular rate and frequency difference was demonstrated. The temperature coefficient of scale factor was as small as -52 ± 136 ppm/°C. The scale factor and bias were stable over 700 hours with the drift less than 0.062 ± 0.100 ppm/hr and 31 ± 121 ppm/hr, respectively.
AB - This paper reports a fully differential frequency modulated (FM) gyroscope where the superposed clockwise (CW) and counter clockwise (CCW) modes are independently controlled on a single resonator. The CW and CCW mode detectors were developed to control both modes simultaneously on the resonator. A frequency and quality factor mismatch compensation method was developed to perfectly orthogonalize these two modes. A FM gyroscope operation with excellent linearity between applied angular rate and frequency difference was demonstrated. The temperature coefficient of scale factor was as small as -52 ± 136 ppm/°C. The scale factor and bias were stable over 700 hours with the drift less than 0.062 ± 0.100 ppm/hr and 31 ± 121 ppm/hr, respectively.
KW - CW/CCW-mode separator
KW - FM Gyroscope
KW - mismatch compensation
KW - mode-matched MEMS resonator
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U2 - 10.1109/JMEMS.2018.2874060
DO - 10.1109/JMEMS.2018.2874060
M3 - Article
AN - SCOPUS:85055196735
SN - 1057-7157
VL - 27
SP - 985
EP - 994
JO - Journal of Microelectromechanical Systems
JF - Journal of Microelectromechanical Systems
IS - 6
M1 - 8501921
ER -