Fully differential single resonator FM gyroscope using CW/CCW mode separator

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This paper reports a fully differential frequency modulated (FM) gyroscope where the superposed clockwise (CW) and counter clockwise (CCW) modes are independently controlled on a single resonator. The CW and CCW mode detectors were developed to control both modes simultaneously on the resonator. A frequency and quality factor mismatch compensation method was developed to perfectly orthogonalize these two modes. A FM gyroscope operation with excellent linearity between applied angular rate and frequency difference was demonstrated. The temperature coefficient of scale factor was as small as -52 ± 136 ppm/°C. The scale factor and bias were stable over 700 hours with the drift less than 0.062 ± 0.100 ppm/hr and 31 ± 121 ppm/hr, respectively.

Original languageEnglish
Article number8501921
Pages (from-to)985-994
Number of pages10
JournalJournal of Microelectromechanical Systems
Issue number6
Publication statusPublished - 2018 Dec


  • CW/CCW-mode separator
  • FM Gyroscope
  • mismatch compensation
  • mode-matched MEMS resonator


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