TY - GEN
T1 - Fully-differential single resonator FM/whole angle gyroscope using CW/CCW mode separator
AU - Tsukamoto, Takashiro
AU - Tanaka, Shuji
N1 - Publisher Copyright:
© 2017 IEEE.
PY - 2017/2/23
Y1 - 2017/2/23
N2 - This paper reports a fully-differential frequency modulated (FM) gyroscope where superposed clockwise (CW) and counter clockwise (CCW) modes are independently controlled on a single resonator. A CW/CCW mode separator was implemented with a mode-matched ring resonator, and FM gyroscope operation with excellent linearity between applied angular rate and frequency difference was demonstrated. The scale factor was as high as 0.724, and measured almost zero temperature coefficient including ±26 ppm uncertainty without any compensation. Whole angle mode operation was also demonstrated using the same system and excellent linear relationship between applied rotation angle and measured angle was observed.
AB - This paper reports a fully-differential frequency modulated (FM) gyroscope where superposed clockwise (CW) and counter clockwise (CCW) modes are independently controlled on a single resonator. A CW/CCW mode separator was implemented with a mode-matched ring resonator, and FM gyroscope operation with excellent linearity between applied angular rate and frequency difference was demonstrated. The scale factor was as high as 0.724, and measured almost zero temperature coefficient including ±26 ppm uncertainty without any compensation. Whole angle mode operation was also demonstrated using the same system and excellent linear relationship between applied rotation angle and measured angle was observed.
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U2 - 10.1109/MEMSYS.2017.7863610
DO - 10.1109/MEMSYS.2017.7863610
M3 - Conference contribution
AN - SCOPUS:85015721470
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 1118
EP - 1121
BT - 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
Y2 - 22 January 2017 through 26 January 2017
ER -