TY - JOUR
T1 - Functional nitrogen science based on plasma processing
T2 - Quantum devices, photocatalysts and activation of plant defense and immune systems
AU - Kaneko, Toshiro
AU - Kato, Hiromitsu
AU - Yamada, Hideaki
AU - Yamamoto, Muneaki
AU - Yoshida, Tomoko
AU - Attri, Pankaj
AU - Koga, Kazunori
AU - Murakami, Tomoyuki
AU - Kuchitsu, Kazuyuki
AU - Ando, Sugihiro
AU - Nishikawa, Yasuhiro
AU - Tomita, Kentaro
AU - Ono, Ryo
AU - Ito, Tsuyohito
AU - Ito, Atsushi M.
AU - Eriguchi, Koji
AU - Nozaki, Tomohiro
AU - Tsutsumi, Takayoshi
AU - Ishikawa, Kenji
N1 - Publisher Copyright:
© 2021 The Author(s). Published on behalf of The Japan Society of Applied Physics by IOP Publishing Ltd.
PY - 2022/1
Y1 - 2022/1
N2 - Nitrogen is a very common element, comprising approximately 78% of Earth's atmosphere, and is an important component of various electronic devices while also being essential for life. However, it is challenging to directly utilize dinitrogen because of the highly stable triple bond in this molecule. The present review examines the use of non-equilibrium plasmas to generate controlled electron impacts as a means of generating reactive nitrogen species (RNS) with high internal energy values and extremely short lifetimes. These species include ground state nitrogen atoms, excited nitrogen atoms, etc. RNS can subsequently react with oxygen and/or hydrogen to generate new highly reactive compounds and can also be used to control various cell functions and create new functional materials. Herein, plasma-processing methods intended to provide RNS serving as short-lived precursors for a range of applications are examined in detail.
AB - Nitrogen is a very common element, comprising approximately 78% of Earth's atmosphere, and is an important component of various electronic devices while also being essential for life. However, it is challenging to directly utilize dinitrogen because of the highly stable triple bond in this molecule. The present review examines the use of non-equilibrium plasmas to generate controlled electron impacts as a means of generating reactive nitrogen species (RNS) with high internal energy values and extremely short lifetimes. These species include ground state nitrogen atoms, excited nitrogen atoms, etc. RNS can subsequently react with oxygen and/or hydrogen to generate new highly reactive compounds and can also be used to control various cell functions and create new functional materials. Herein, plasma-processing methods intended to provide RNS serving as short-lived precursors for a range of applications are examined in detail.
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U2 - 10.35848/1347-4065/ac25dc
DO - 10.35848/1347-4065/ac25dc
M3 - Review article
AN - SCOPUS:85123456648
SN - 0021-4922
VL - 61
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
IS - SA
M1 - SA0805
ER -