@inproceedings{cb0734bdda234ba58d3fc4dc78c048f4,
title = "Fundamental investigation of influence of air compressibility on displacement control performances of aerostatic bearings",
abstract = "This paper deals with displacement control of aerostatic bearings. Displacement of the aerostatic bearings can be controlled by controlling supplied air flow based on an appropriately designed feedback controller. The static characteristics of the designed feedback system were investigated experimentally. It is then shown that the positioning accuracy of the tested system was the tens of the nanometers. In addition, the influence of the air compressibility on the dynamic characteristics of the control system is investigated via simulation studies. The simulation studies reveal the air compressibility of the aerostatic bearings increases the time delay of response.",
keywords = "Aerostatic bearings, Air compressibility, Displacement control, Spindle, Ultra-precision machine tools",
author = "Yohichi Nakao and Daiki Fukui and Satsuki Yamazaki and Junpei Kusuyama and Dmytro Fedorynenko",
note = "Funding Information: Displacement control of aerostatic bearings was studied. The displacement of the aerostatic bearings was successfully controlled with extremely small positioning error. It is then shown that the positioning accuracy of the tested system was about 25 nanometers. The simulation studies indicate how air volume in the supply line affects time delay of the response. A servo control system of aerostatic bearings will be designed based on the results. This research work is financially supported by the Grant-in-Aid for Scientific Research (C) of the Japan Society for the Promotion of Science. Publisher Copyright: {\textcopyright} 2019 European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 19th International Conference and Exhibition, EUSPEN 2019. All rights reserved.; 19th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2019 ; Conference date: 03-06-2019 Through 07-06-2019",
year = "2019",
language = "English",
series = "European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 19th International Conference and Exhibition, EUSPEN 2019",
publisher = "euspen",
pages = "560--561",
editor = "Leach, {Richard K.} and D. Billington and C. Nisbet and D. Phillips",
booktitle = "European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 19th International Conference and Exhibition, EUSPEN 2019",
}