| Original language | English |
|---|---|
| Pages (from-to) | 860-867 |
| Number of pages | 8 |
| Journal | Shinku/Journal of the Vacuum Society of Japan |
| Volume | 44 |
| Issue number | 10 |
| DOIs | |
| Publication status | Published - 2001 Oct |
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering