Gas-phase and film analysis of hydrogenated amorphous carbon films: Effect of ion bombardment energy flux on sp2 carbon structures

Hirotsugu Sugiura; Yasuyuki Ohashi; Kenji Ishikawa; Hiroki Kondo; Toshiaki Kato; Toshiro Kaneko; Keigo Takeda; Takayoshi Tsutsumi; Toshio Hayashi; Makoto Sekine; Masaru Hori

doi:10.1016/j.diamond.2019.107651

Gas-phase and film analysis of hydrogenated amorphous carbon films: Effect of ion bombardment energy flux on sp² carbon structures

Hirotsugu Sugiura, Yasuyuki Ohashi, Kenji Ishikawa, Hiroki Kondo, Toshiaki Kato, Toshiro Kaneko, Keigo Takeda, Takayoshi Tsutsumi, Toshio Hayashi, Makoto Sekine, Masaru Hori

ENG - Electronic Engineering

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

Hydrogenated amorphous carbon (a-C:H) films comprise nanoclustering graphites (nc-G), fused aromatic rings (nR), and olefinic chain clusters (nC) of sp²-bonded carbons in an sp³ matrix. In this study, the sp² composition of the nc-G, nR and nC in a-C:H films is found to be determined by the ion bombardment energy flux (Γ_Ei), which can be estimated as the product of ion bombardment energy and ion flux onto the deposited surface, in plasma-enhanced chemical vapor deposition using a plasma mixture of H₂ and CH₄ gases with the H radical injection method. The sp² composition is analyzed using Raman spectroscopy and near-edge X-ray absorption structure spectroscopy. a-C:H becomes increasingly graphitized with increasing Γ_Ei. The precise control of the sp² C structure composition can be achieved by controlling the very-high-frequency input power and radio frequency input bias power via the ion flux and ion bombardment energy.

Original language	English
Article number	107651
Journal	Diamond and Related Materials
Volume	104
DOIs	https://doi.org/10.1016/j.diamond.2019.107651
Publication status	Published - 2020 Apr

Keywords

Amorphous carbon
Near-edge X-ray absorption fine structure (NEXAFS)
Plasma-enhanced chemical vapor deposition (PECVD)
Raman spectroscopy

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Chemistry(all)
Mechanical Engineering
Materials Chemistry
Electrical and Electronic Engineering

Access to Document

10.1016/j.diamond.2019.107651

Cite this

@article{8055331008d645eb8b8dcf787a3df909,

title = "Gas-phase and film analysis of hydrogenated amorphous carbon films: Effect of ion bombardment energy flux on sp2 carbon structures",

abstract = "Hydrogenated amorphous carbon (a-C:H) films comprise nanoclustering graphites (nc-G), fused aromatic rings (nR), and olefinic chain clusters (nC) of sp2-bonded carbons in an sp3 matrix. In this study, the sp2 composition of the nc-G, nR and nC in a-C:H films is found to be determined by the ion bombardment energy flux (ΓEi), which can be estimated as the product of ion bombardment energy and ion flux onto the deposited surface, in plasma-enhanced chemical vapor deposition using a plasma mixture of H2 and CH4 gases with the H radical injection method. The sp2 composition is analyzed using Raman spectroscopy and near-edge X-ray absorption structure spectroscopy. a-C:H becomes increasingly graphitized with increasing ΓEi. The precise control of the sp2 C structure composition can be achieved by controlling the very-high-frequency input power and radio frequency input bias power via the ion flux and ion bombardment energy.",

keywords = "Amorphous carbon, Near-edge X-ray absorption fine structure (NEXAFS), Plasma-enhanced chemical vapor deposition (PECVD), Raman spectroscopy",

author = "Hirotsugu Sugiura and Yasuyuki Ohashi and Kenji Ishikawa and Hiroki Kondo and Toshiaki Kato and Toshiro Kaneko and Keigo Takeda and Takayoshi Tsutsumi and Toshio Hayashi and Makoto Sekine and Masaru Hori",

note = "Funding Information: The authors would like to thank Dr. Masashi Nakatake of the Aichi Synchrotron Radiation Center, Aichi Science & Technology Foundation, Aichi, Japan, for support with the NEXAFS measurements, and Dr. Koji Yamakawa and Mr. Yoshiaki Watanabe for technical support. Publisher Copyright: {\textcopyright} 2019",

year = "2020",

month = apr,

doi = "10.1016/j.diamond.2019.107651",

language = "English",

volume = "104",

journal = "Diamond and Related Materials",

issn = "0925-9635",

publisher = "Elsevier BV",

}

TY - JOUR

T1 - Gas-phase and film analysis of hydrogenated amorphous carbon films

T2 - Effect of ion bombardment energy flux on sp2 carbon structures

AU - Sugiura, Hirotsugu

AU - Ohashi, Yasuyuki

AU - Ishikawa, Kenji

AU - Kondo, Hiroki

AU - Kato, Toshiaki

AU - Kaneko, Toshiro

AU - Takeda, Keigo

AU - Tsutsumi, Takayoshi

AU - Hayashi, Toshio

AU - Sekine, Makoto

AU - Hori, Masaru

N1 - Funding Information: The authors would like to thank Dr. Masashi Nakatake of the Aichi Synchrotron Radiation Center, Aichi Science & Technology Foundation, Aichi, Japan, for support with the NEXAFS measurements, and Dr. Koji Yamakawa and Mr. Yoshiaki Watanabe for technical support. Publisher Copyright: © 2019

PY - 2020/4

Y1 - 2020/4

N2 - Hydrogenated amorphous carbon (a-C:H) films comprise nanoclustering graphites (nc-G), fused aromatic rings (nR), and olefinic chain clusters (nC) of sp2-bonded carbons in an sp3 matrix. In this study, the sp2 composition of the nc-G, nR and nC in a-C:H films is found to be determined by the ion bombardment energy flux (ΓEi), which can be estimated as the product of ion bombardment energy and ion flux onto the deposited surface, in plasma-enhanced chemical vapor deposition using a plasma mixture of H2 and CH4 gases with the H radical injection method. The sp2 composition is analyzed using Raman spectroscopy and near-edge X-ray absorption structure spectroscopy. a-C:H becomes increasingly graphitized with increasing ΓEi. The precise control of the sp2 C structure composition can be achieved by controlling the very-high-frequency input power and radio frequency input bias power via the ion flux and ion bombardment energy.

AB - Hydrogenated amorphous carbon (a-C:H) films comprise nanoclustering graphites (nc-G), fused aromatic rings (nR), and olefinic chain clusters (nC) of sp2-bonded carbons in an sp3 matrix. In this study, the sp2 composition of the nc-G, nR and nC in a-C:H films is found to be determined by the ion bombardment energy flux (ΓEi), which can be estimated as the product of ion bombardment energy and ion flux onto the deposited surface, in plasma-enhanced chemical vapor deposition using a plasma mixture of H2 and CH4 gases with the H radical injection method. The sp2 composition is analyzed using Raman spectroscopy and near-edge X-ray absorption structure spectroscopy. a-C:H becomes increasingly graphitized with increasing ΓEi. The precise control of the sp2 C structure composition can be achieved by controlling the very-high-frequency input power and radio frequency input bias power via the ion flux and ion bombardment energy.

KW - Amorphous carbon

KW - Near-edge X-ray absorption fine structure (NEXAFS)

KW - Plasma-enhanced chemical vapor deposition (PECVD)

KW - Raman spectroscopy

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