@inproceedings{78173fe08b854a31b8f0d1c348b1241e,
title = "Germanium nano disk array fabrication by combination of bio template and neutral beam etching for solar cell application",
abstract = "A high density uniform 10 nm amorphous Ge nanodisk structure could be successfully fabricated by a combination of a bio-template to fabricate a high density etching mask of 7 × 1011cm-2 and a neutral beam top-down process. Center-to-center distance of each ferritin was estimated at 13 nm. The fabricated Ge nanostructure showed increasing band gap energy from 1.5 eV up to 1.9 eV when the thickness of the nanostructure was decreased from 8 nm to 2 nm. The fabricated high density germanium nanostructure is expected to be used in many quantum effect devices such as quantum dot solar cells.",
keywords = "bio template, germanium nano disk, neutral beam etching, quantum dots. intermediate solar cell",
author = "Takuya Fujii and Takeru Okada and Syazwan, {Mohd Erman} and Taiga Isoda and Hirotaka Endo and Rahman, {Mohammad Maksudur} and Kohei Ito and Seiji Samukawa",
note = "Publisher Copyright: {\textcopyright} 2014 IEEE.; 40th IEEE Photovoltaic Specialist Conference, PVSC 2014 ; Conference date: 08-06-2014 Through 13-06-2014",
year = "2014",
month = oct,
day = "15",
doi = "10.1109/PVSC.2014.6925090",
language = "English",
series = "2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1033--1036",
booktitle = "2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014",
address = "United States",
}