Grain orientation dependence on distance to surface of CVD diamond film

Free standing chemical vapour deposition (CVD) diamond films were prepared under the gas recycling mode, where the substrate temperature ranged from 820 to 1050°C. Macro- and microtextures of the films were investigated based on the orientation distribution function (ODF) and electron backscatter diffraction (EBSD) analysis. The texture consisted of 〈001〉, 〈112〉, 〈111〉, 〈221〉 and 〈110〉 fibre components. Very high twinning frequency was observed because of the reduced purity of the deposition gas. The multi-twins appearing in series as well as in paratactic form reduced the grain size and randomised the orientation distribution. It is believed that the residual strain and stress in diamond films should relate to the fibre textures in certain extent because of the anisotropic elastic characteristics of diamond crystals.