Grazing-exit x-ray spectrometry for surface, and thin-film analyses

K. Tsuji, Z. Spolnik, K. Wagatsuma, S. Nagata, I. Satoh

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)


Electron-probe x-ray micro analysis (EPMA) and particle-induced x-ray emission analysis (PIXE) were performed under grazing-exit conditions. To control the exit angle (take-off angle), a new sample holder having a stepping motor was developed for grazing-exit EPMA. A carefully polished surface of a stainless-steal sample was measured. The surface of stainless steel is normally covered with a thin native oxide layer. The intensity ratio of Cr Ka to Fe Kq increases significantly at the grazing angle, becoming about 5-times larger at 0.2° than at 40°. This result indicates that grazing-exit EPMA is useful for surface analysis. In addition, a new PIXE equipment was developed for grazing-exit x-ray measurements. The sample is fixed and the x-ray detector is moved by applying a linear stage. Preliminary experimental results of grazing-exit PIXE are also shown.

Original languageEnglish
Pages (from-to)145-148
Number of pages4
Journalanalytical sciences
Issue number1
Publication statusPublished - 2001
Externally publishedYes

ASJC Scopus subject areas

  • Analytical Chemistry


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