Abstract
The minority carrier lifetime (MCL)/flow pattern defect of B and Ge co-doped Czochralski silicon (CZ-Si) was increased/decreased with the initial Ge concentration up to 3 × 1020 cm-3 and decreased/increased at higher Ge concentrations. Secco etch pit defects were increased in heavily (≥3 × 1020 cm-3) Ge co-doped CZ-Si (grown at low growth rate), which resulted in a low MCL. The influence of Ge on microdefect variation was relatively lower than the crystal growth rate in heavily Ge co-doped CZ-Si.
Original language | English |
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Pages (from-to) | 686-689 |
Number of pages | 4 |
Journal | Scripta Materialia |
Volume | 69 |
Issue number | 9 |
DOIs | |
Publication status | Published - 2013 Nov |
Keywords
- B and Ge co-doping
- Czochralski silicon
- Grown-in microdefects
- lifetime
- Minority carrier