Growth and microstructure of Ba β-alumina films by laser chemical vapor deposition

Akihiko Ito; Yu You; Hirokazu Katsui; Takashi Goto

doi:10.1016/j.jeurceramsoc.2013.04.003

Growth and microstructure of Ba β-alumina films by laser chemical vapor deposition

Akihiko Ito, Yu You, Hirokazu Katsui, Takashi Goto

Materials Processing and Characterization Division

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

Ba β-alumina films were prepared by laser chemical vapor deposition. Mostly single-phase Ba β-alumina films were obtained at 1125-1200K and for an Al/Ba molar ratio of 12.4-16.6. BaAl₂O₄ and α-Al₂O₃ were codeposited with Ba β-alumina under Ba- and Al-rich conditions, respectively. The Ba β-alumina films consisted of hexagonal grains, and the (110)-oriented Ba β-alumina films had a fin-like columnar structure. The highest deposition rate reached 120μmh^-1 at around 1200K. A thin layer of Ba-rich superstructure was formed on the surface of the (110)-oriented columnar grains.

Original language	English
Pages (from-to)	2655-2661
Number of pages	7
Journal	Journal of the European Ceramic Society
Volume	33
Issue number	13-14
DOIs	https://doi.org/10.1016/j.jeurceramsoc.2013.04.003
Publication status	Published - 2013 Nov

Keywords

Ba β-alumina
Laser CVD
Microstructure
Oriented growth

ASJC Scopus subject areas

Ceramics and Composites
Materials Chemistry

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10.1016/j.jeurceramsoc.2013.04.003

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title = "Growth and microstructure of Ba β-alumina films by laser chemical vapor deposition",

abstract = "Ba β-alumina films were prepared by laser chemical vapor deposition. Mostly single-phase Ba β-alumina films were obtained at 1125-1200K and for an Al/Ba molar ratio of 12.4-16.6. BaAl2O4 and α-Al2O3 were codeposited with Ba β-alumina under Ba- and Al-rich conditions, respectively. The Ba β-alumina films consisted of hexagonal grains, and the (110)-oriented Ba β-alumina films had a fin-like columnar structure. The highest deposition rate reached 120μmh-1 at around 1200K. A thin layer of Ba-rich superstructure was formed on the surface of the (110)-oriented columnar grains.",

keywords = "Ba β-alumina, Laser CVD, Microstructure, Oriented growth",

author = "Akihiko Ito and Yu You and Hirokazu Katsui and Takashi Goto",

note = "Funding Information: This study was supported in part by the Global COE Program of Materials Integration, Tohoku University and in part by a cooperative program of ARCMG-IMR, Tohoku University . This research was also supported in part by the Japan Society for the Promotion of Science , Grant-in-Aid for Young Scientists (B), 22760550, and by the Ministry of Education, Science, Sports and Culture , Grant-in-Aid for Scientific Research (A), 22246082.",

year = "2013",

month = nov,

doi = "10.1016/j.jeurceramsoc.2013.04.003",

language = "English",

volume = "33",

pages = "2655--2661",

journal = "Journal of the European Ceramic Society",

issn = "0955-2219",

publisher = "Elsevier BV",

number = "13-14",

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TY - JOUR

T1 - Growth and microstructure of Ba β-alumina films by laser chemical vapor deposition

AU - Ito, Akihiko

AU - You, Yu

AU - Katsui, Hirokazu

AU - Goto, Takashi

N1 - Funding Information: This study was supported in part by the Global COE Program of Materials Integration, Tohoku University and in part by a cooperative program of ARCMG-IMR, Tohoku University . This research was also supported in part by the Japan Society for the Promotion of Science , Grant-in-Aid for Young Scientists (B), 22760550, and by the Ministry of Education, Science, Sports and Culture , Grant-in-Aid for Scientific Research (A), 22246082.

PY - 2013/11

Y1 - 2013/11

N2 - Ba β-alumina films were prepared by laser chemical vapor deposition. Mostly single-phase Ba β-alumina films were obtained at 1125-1200K and for an Al/Ba molar ratio of 12.4-16.6. BaAl2O4 and α-Al2O3 were codeposited with Ba β-alumina under Ba- and Al-rich conditions, respectively. The Ba β-alumina films consisted of hexagonal grains, and the (110)-oriented Ba β-alumina films had a fin-like columnar structure. The highest deposition rate reached 120μmh-1 at around 1200K. A thin layer of Ba-rich superstructure was formed on the surface of the (110)-oriented columnar grains.

AB - Ba β-alumina films were prepared by laser chemical vapor deposition. Mostly single-phase Ba β-alumina films were obtained at 1125-1200K and for an Al/Ba molar ratio of 12.4-16.6. BaAl2O4 and α-Al2O3 were codeposited with Ba β-alumina under Ba- and Al-rich conditions, respectively. The Ba β-alumina films consisted of hexagonal grains, and the (110)-oriented Ba β-alumina films had a fin-like columnar structure. The highest deposition rate reached 120μmh-1 at around 1200K. A thin layer of Ba-rich superstructure was formed on the surface of the (110)-oriented columnar grains.

KW - Ba β-alumina

KW - Laser CVD

KW - Microstructure

KW - Oriented growth

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SN - 0955-2219

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JO - Journal of the European Ceramic Society

JF - Journal of the European Ceramic Society

IS - 13-14

ER -

Growth and microstructure of Ba β-alumina films by laser chemical vapor deposition

Abstract

Keywords

ASJC Scopus subject areas

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