Growth of 3-inch langasite single crystal and its application to substrate for surface acoustic wave filters

Satoshi Uda, Akihiro Bungo, Chunyun Jian

Research output: Contribution to journalArticlepeer-review

40 Citations (Scopus)

Abstract

Macro defect-free langasite (La3Ga5SiO14) of 3″ diameter was grown by the Czochralski technique. Thermal treatment of the melt and a uniform interface shape are important for langasite growth with a clear habit of faceting. The homogeneity in composition was two-dimensionally investigated by X-ray diffraction analysis and SAW (surface acoustic wave) velocity distribution on the wafer fabricated from the crystal. The deviation was sufficiently small for the use of langasite as a suitable substrate in SAW device applications. SAW properties were calculated based on the available material constants.

Original languageEnglish
Pages (from-to)5516-5519
Number of pages4
JournalJapanese Journal of Applied Physics
Volume38
Issue number9 B
DOIs
Publication statusPublished - 1999

Keywords

  • Cluster
  • Facet
  • Interface
  • Langasite
  • SAW filter
  • Soaking
  • Supercooling

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