Abstract
Molecular beam epitaxial growth of (GaAs)n/(InAs)n superlattice semiconductors is reported. Reflection electron diffraction was used to monitor the growth process. Successful growth of (GaAs)n/(InAs)n (n= 1, 2) on InP substrate was confirmed by X-ray diffraction.
Original language | English |
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Pages (from-to) | L682-L684 |
Journal | Japanese Journal of Applied Physics |
Volume | 24 |
Issue number | 9 |
DOIs | |
Publication status | Published - 1985 Sept |