Growth of vertical silicon nanowires array using electrochemical alternative

Van Hoang Nguyen; Haruna Watanabe; Yusuke Hoshi; Takanori Kiguchi; Toyohiko Konno; Seiji Samukawa; Noritaka Usami

doi:10.1109/PVSC.2013.6744969

Growth of vertical silicon nanowires array using electrochemical alternative

Van Hoang Nguyen, Haruna Watanabe, Yusuke Hoshi, Takanori Kiguchi, Toyohiko Konno, Seiji Samukawa, Noritaka Usami

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

Silicon nanowires have been grown on Si (111) substrate using the vapor-liquid-solid (VLS) via anodic aluminum oxide (AAO) fabrication and gold plating deposition. The pore diameters of AAO are expected to be closely related with the size of gold catalyst as well as the diameter of the subsequently grown silicon nanowires. The nanochannel diameter of AAO template was controlled by modifying the applied potential in different values. Filling the small amount of Au at the bottom of AAO template was realized by electrochemically plating technique. The sub-20nm diameter gold nanowires were formed thanks to long plating duration. The growth of vertical silicon nanowires by VLS techniques was carried out in different growth time using disilane as a source gas.

Original language	English
Title of host publication	39th IEEE Photovoltaic Specialists Conference, PVSC 2013
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	2443-2446
Number of pages	4
ISBN (Print)	9781479932993
DOIs	https://doi.org/10.1109/PVSC.2013.6744969
Publication status	Published - 2013
Event	39th IEEE Photovoltaic Specialists Conference, PVSC 2013 - Tampa, FL, United States Duration: 2013 Jun 16 → 2013 Jun 21

Publication series

Name	Conference Record of the IEEE Photovoltaic Specialists Conference
ISSN (Print)	0160-8371

Other

Other	39th IEEE Photovoltaic Specialists Conference, PVSC 2013
Country/Territory	United States
City	Tampa, FL
Period	13/6/16 → 13/6/21

Keywords

Anodic Aluminum Oxide
Gold plating
Silicon nanowires
Vapor liquid solid

ASJC Scopus subject areas

Control and Systems Engineering
Industrial and Manufacturing Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/PVSC.2013.6744969

Cite this

Nguyen, V. H., Watanabe, H., Hoshi, Y., Kiguchi, T., Konno, T., Samukawa, S., & Usami, N. (2013). Growth of vertical silicon nanowires array using electrochemical alternative. In 39th IEEE Photovoltaic Specialists Conference, PVSC 2013 (pp. 2443-2446). [6744969] (Conference Record of the IEEE Photovoltaic Specialists Conference). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/PVSC.2013.6744969

Growth of vertical silicon nanowires array using electrochemical alternative. / Nguyen, Van Hoang; Watanabe, Haruna; Hoshi, Yusuke et al.
39th IEEE Photovoltaic Specialists Conference, PVSC 2013. Institute of Electrical and Electronics Engineers Inc., 2013. p. 2443-2446 6744969 (Conference Record of the IEEE Photovoltaic Specialists Conference).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Nguyen, VH, Watanabe, H, Hoshi, Y, Kiguchi, T, Konno, T, Samukawa, S & Usami, N 2013, Growth of vertical silicon nanowires array using electrochemical alternative. in 39th IEEE Photovoltaic Specialists Conference, PVSC 2013., 6744969, Conference Record of the IEEE Photovoltaic Specialists Conference, Institute of Electrical and Electronics Engineers Inc., pp. 2443-2446, 39th IEEE Photovoltaic Specialists Conference, PVSC 2013, Tampa, FL, United States, 13/6/16. https://doi.org/10.1109/PVSC.2013.6744969

Nguyen VH, Watanabe H, Hoshi Y, Kiguchi T, Konno T, Samukawa S et al. Growth of vertical silicon nanowires array using electrochemical alternative. In 39th IEEE Photovoltaic Specialists Conference, PVSC 2013. Institute of Electrical and Electronics Engineers Inc. 2013. p. 2443-2446. 6744969. (Conference Record of the IEEE Photovoltaic Specialists Conference). doi: 10.1109/PVSC.2013.6744969

@inproceedings{5c052942f0e74001a72b29599af1823d,

title = "Growth of vertical silicon nanowires array using electrochemical alternative",

abstract = "Silicon nanowires have been grown on Si (111) substrate using the vapor-liquid-solid (VLS) via anodic aluminum oxide (AAO) fabrication and gold plating deposition. The pore diameters of AAO are expected to be closely related with the size of gold catalyst as well as the diameter of the subsequently grown silicon nanowires. The nanochannel diameter of AAO template was controlled by modifying the applied potential in different values. Filling the small amount of Au at the bottom of AAO template was realized by electrochemically plating technique. The sub-20nm diameter gold nanowires were formed thanks to long plating duration. The growth of vertical silicon nanowires by VLS techniques was carried out in different growth time using disilane as a source gas.",

keywords = "Anodic Aluminum Oxide, Gold plating, Silicon nanowires, Vapor liquid solid",

author = "Nguyen, {Van Hoang} and Haruna Watanabe and Yusuke Hoshi and Takanori Kiguchi and Toyohiko Konno and Seiji Samukawa and Noritaka Usami",

year = "2013",

doi = "10.1109/PVSC.2013.6744969",

language = "English",

isbn = "9781479932993",

series = "Conference Record of the IEEE Photovoltaic Specialists Conference",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "2443--2446",

booktitle = "39th IEEE Photovoltaic Specialists Conference, PVSC 2013",

}

TY - GEN

T1 - Growth of vertical silicon nanowires array using electrochemical alternative

AU - Nguyen, Van Hoang

AU - Watanabe, Haruna

AU - Hoshi, Yusuke

AU - Kiguchi, Takanori

AU - Konno, Toyohiko

AU - Samukawa, Seiji

AU - Usami, Noritaka

PY - 2013

Y1 - 2013

N2 - Silicon nanowires have been grown on Si (111) substrate using the vapor-liquid-solid (VLS) via anodic aluminum oxide (AAO) fabrication and gold plating deposition. The pore diameters of AAO are expected to be closely related with the size of gold catalyst as well as the diameter of the subsequently grown silicon nanowires. The nanochannel diameter of AAO template was controlled by modifying the applied potential in different values. Filling the small amount of Au at the bottom of AAO template was realized by electrochemically plating technique. The sub-20nm diameter gold nanowires were formed thanks to long plating duration. The growth of vertical silicon nanowires by VLS techniques was carried out in different growth time using disilane as a source gas.

AB - Silicon nanowires have been grown on Si (111) substrate using the vapor-liquid-solid (VLS) via anodic aluminum oxide (AAO) fabrication and gold plating deposition. The pore diameters of AAO are expected to be closely related with the size of gold catalyst as well as the diameter of the subsequently grown silicon nanowires. The nanochannel diameter of AAO template was controlled by modifying the applied potential in different values. Filling the small amount of Au at the bottom of AAO template was realized by electrochemically plating technique. The sub-20nm diameter gold nanowires were formed thanks to long plating duration. The growth of vertical silicon nanowires by VLS techniques was carried out in different growth time using disilane as a source gas.

KW - Anodic Aluminum Oxide

KW - Gold plating

KW - Silicon nanowires

KW - Vapor liquid solid

UR - http://www.scopus.com/inward/record.url?scp=84896468539&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84896468539&partnerID=8YFLogxK

U2 - 10.1109/PVSC.2013.6744969

DO - 10.1109/PVSC.2013.6744969

M3 - Conference contribution

AN - SCOPUS:84896468539

SN - 9781479932993

T3 - Conference Record of the IEEE Photovoltaic Specialists Conference

SP - 2443

EP - 2446

BT - 39th IEEE Photovoltaic Specialists Conference, PVSC 2013

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 39th IEEE Photovoltaic Specialists Conference, PVSC 2013

Y2 - 16 June 2013 through 21 June 2013

ER -

Growth of vertical silicon nanowires array using electrochemical alternative

Abstract

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Keywords

ASJC Scopus subject areas

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