Growth of vertically aligned carbon nanotube bundles using atmospheric-pressure microplasma

Hiroyuki Yoshiki, Takeru Orada, Kazuhiko Hirai, Rikizo Hatakeyama

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9 Citations (Scopus)


Vertically aligned bundles of multiwalled carbon nanotubes (MWNTs) were grown on the tip of a ø0.5 mm nickel wire using an atmospheric-pressure microplasma (APμP) generated by a RF-powered pipe electrode. A CH4 and H2 gas mixture was used for the source gas, and the nickel wire used as the substrate was negatively biased to heat it by ion bombardment. At a ratio of CH4 : H2 = 1 : 35, a RF power of 6 W, a DC bias voltage of -100 V and a growth time of 2 min, the tip of the nickel wire was covered by bamboo-like MWNT bundles, whose diameter and length were about 600 nm and 2-3 urn, respectively. Each bundle consisted of about 1500 tubes with diameters of 10-25 nm. The growth temperature of the MWNT bundles wasapproximately 500°C.

Original languageEnglish
Pages (from-to)9276-9279
Number of pages4
JournalJapanese Journal of Applied Physics
Issue number12
Publication statusPublished - 2006 Dec 15


  • Atmospheric pressure
  • Bundles
  • Carbon nanotubes
  • Localized growth
  • Microplasma
  • Plasma-enhanced CVD


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