TY - JOUR
T1 - Growth-temperature dependence of the Li/Nb ratio in LPE-grown LiNbo3 films estimated by second-harmonic generation
AU - Kawaguchi, T.
AU - Imaeda, M.
AU - Ohuchi, R.
AU - Minakata, M.
AU - Taniuchi, T.
AU - Fukuda, T.
N1 - Copyright:
Copyright 2018 Elsevier B.V., All rights reserved.
PY - 1996/9
Y1 - 1996/9
N2 - The relationship between the Li/Nb ratio of liquid-phase epitaxial (LPE) grown LiNbO3 films and the growth temperature is investigated by means of second-harmonic generation measurements. Uniform 3-inch-wafer-size epitaxial films, which are available in conventional device fabrication processes, were successfully grown.
AB - The relationship between the Li/Nb ratio of liquid-phase epitaxial (LPE) grown LiNbO3 films and the growth temperature is investigated by means of second-harmonic generation measurements. Uniform 3-inch-wafer-size epitaxial films, which are available in conventional device fabrication processes, were successfully grown.
UR - http://www.scopus.com/inward/record.url?scp=0030230318&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0030230318&partnerID=8YFLogxK
U2 - 10.1016/0022-0248(95)00560-9
DO - 10.1016/0022-0248(95)00560-9
M3 - Article
AN - SCOPUS:0030230318
SN - 0022-0248
VL - 166
SP - 493
EP - 496
JO - Journal of Crystal Growth
JF - Journal of Crystal Growth
IS - 1-4
ER -